7/27/2011	12:16:37 AM	Helium valve closed
7/27/2011	12:16:37 AM	H2 valve closed
7/27/2011	12:16:37 AM	BCl3 valve closed
7/27/2011	12:16:37 AM	PH3 valve closed
7/27/2011	12:16:37 AM	SiCl4 pre valve closed
7/27/2011	12:16:37 AM	SiCl4 post valve closed
7/27/2011	12:16:37 AM	Main Vac valve closed
7/27/2011	12:16:37 AM	Bypass valve closed
7/27/2011	12:16:37 AM	Bubbler valve closed
7/27/2011	12:16:37 AM	Helium MFC set to  0.000000
7/27/2011	12:16:37 AM	H2 MFC set to  0.000000
7/27/2011	12:16:37 AM	BCl3 MFC set to  0.000000
7/27/2011	12:16:37 AM	PHl3 MFC set to  0.000000
7/27/2011	12:16:37 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:16:37 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:16:37 AM	Tube furnace set to 0
7/27/2011	12:16:38 AM	Run finished at 12:16 AM
7/27/2011	12:21:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2011	12:21:47 AM	Recipe started at 12:21 AM
7/27/2011	12:21:47 AM	Helium valve closed
7/27/2011	12:21:47 AM	H2 valve closed
7/27/2011	12:21:47 AM	BCl3 valve closed
7/27/2011	12:21:47 AM	PH3 valve closed
7/27/2011	12:21:47 AM	SiCl4 pre valve closed
7/27/2011	12:21:47 AM	SiCl4 post valve closed
7/27/2011	12:21:47 AM	Main Vac valve closed
7/27/2011	12:21:47 AM	Bypass valve closed
7/27/2011	12:21:47 AM	Bubbler valve closed
7/27/2011	12:21:47 AM	Helium MFC set to  0.000000
7/27/2011	12:21:47 AM	H2 MFC set to  0.000000
7/27/2011	12:21:47 AM	BCl3 MFC set to  0.000000
7/27/2011	12:21:47 AM	PHl3 MFC set to  0.000000
7/27/2011	12:21:47 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:21:47 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:21:47 AM	Tube furnace set to 0
7/27/2011	12:21:50 AM	H2 valve closed
7/27/2011	12:21:50 AM	BCl3 valve closed
7/27/2011	12:21:50 AM	PH3 valve closed
7/27/2011	12:21:50 AM	SiCl4 pre valve closed
7/27/2011	12:21:50 AM	SiCl4 post valve closed
7/27/2011	12:21:50 AM	Main Vac valve closed
7/27/2011	12:21:50 AM	Bypass valve closed
7/27/2011	12:21:50 AM	Bubbler valve closed
7/27/2011	12:21:50 AM	Helium valve opened
7/27/2011	12:21:50 AM	Helium MFC set to  500.000000
7/27/2011	12:21:50 AM	H2 MFC set to  0.000000
7/27/2011	12:21:50 AM	BCl3 MFC set to  0.000000
7/27/2011	12:21:50 AM	PHl3 MFC set to  0.000000
7/27/2011	12:21:50 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:21:50 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:21:50 AM	Tube furnace set to 0
7/27/2011	12:21:50 AM	Helium valve closed
7/27/2011	12:21:50 AM	H2 valve closed
7/27/2011	12:21:50 AM	BCl3 valve closed
7/27/2011	12:21:50 AM	PH3 valve closed
7/27/2011	12:21:50 AM	SiCl4 pre valve closed
7/27/2011	12:21:50 AM	SiCl4 post valve closed
7/27/2011	12:21:50 AM	Main Vac valve closed
7/27/2011	12:21:50 AM	Bypass valve closed
7/27/2011	12:21:50 AM	Bubbler valve closed
7/27/2011	12:21:50 AM	Helium MFC set to  0.000000
7/27/2011	12:21:50 AM	H2 MFC set to  0.000000
7/27/2011	12:21:50 AM	BCl3 MFC set to  0.000000
7/27/2011	12:21:50 AM	PHl3 MFC set to  0.000000
7/27/2011	12:21:50 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:21:50 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:21:50 AM	Tube furnace set to 0
7/27/2011	12:21:51 AM	Run finished at 12:21 AM
7/27/2011	12:21:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2011	12:25:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	12:25:13 AM	Recipe started at 12:25 AM
7/27/2011	12:25:13 AM	Helium valve closed
7/27/2011	12:25:13 AM	H2 valve closed
7/27/2011	12:25:13 AM	BCl3 valve closed
7/27/2011	12:25:13 AM	PH3 valve closed
7/27/2011	12:25:13 AM	SiCl4 pre valve closed
7/27/2011	12:25:13 AM	SiCl4 post valve closed
7/27/2011	12:25:13 AM	Main Vac valve closed
7/27/2011	12:25:13 AM	Bubbler valve closed
7/27/2011	12:25:13 AM	Bypass valve opened
7/27/2011	12:25:13 AM	Helium MFC set to  0.000000
7/27/2011	12:25:13 AM	H2 MFC set to  0.000000
7/27/2011	12:25:13 AM	BCl3 MFC set to  0.000000
7/27/2011	12:25:13 AM	PHl3 MFC set to  0.000000
7/27/2011	12:25:13 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:25:13 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:25:13 AM	Tube furnace set to 0
7/27/2011	12:26:14 AM	Helium valve closed
7/27/2011	12:26:14 AM	H2 valve closed
7/27/2011	12:26:14 AM	BCl3 valve closed
7/27/2011	12:26:14 AM	PH3 valve closed
7/27/2011	12:26:14 AM	SiCl4 pre valve closed
7/27/2011	12:26:14 AM	SiCl4 post valve closed
7/27/2011	12:26:14 AM	Main Vac valve closed
7/27/2011	12:26:14 AM	Bubbler valve closed
7/27/2011	12:26:14 AM	Bypass valve opened
7/27/2011	12:26:14 AM	Helium MFC set to  0.000000
7/27/2011	12:26:14 AM	H2 MFC set to  0.000000
7/27/2011	12:26:14 AM	BCl3 MFC set to  0.000000
7/27/2011	12:26:14 AM	PHl3 MFC set to  0.000000
7/27/2011	12:26:14 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:26:14 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:26:14 AM	Tube furnace set to 0
7/27/2011	12:27:14 AM	Helium valve closed
7/27/2011	12:27:14 AM	H2 valve closed
7/27/2011	12:27:14 AM	BCl3 valve closed
7/27/2011	12:27:14 AM	PH3 valve closed
7/27/2011	12:27:14 AM	SiCl4 pre valve closed
7/27/2011	12:27:14 AM	SiCl4 post valve closed
7/27/2011	12:27:14 AM	Bypass valve closed
7/27/2011	12:27:14 AM	Bubbler valve closed
7/27/2011	12:27:14 AM	Main Vac valve opened
7/27/2011	12:27:14 AM	Helium MFC set to  0.000000
7/27/2011	12:27:14 AM	H2 MFC set to  0.000000
7/27/2011	12:27:14 AM	BCl3 MFC set to  0.000000
7/27/2011	12:27:14 AM	PHl3 MFC set to  0.000000
7/27/2011	12:27:14 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:27:15 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:27:15 AM	Tube furnace set to 0
7/27/2011	12:27:16 AM	Run finished at 12:27 AM
7/27/2011	12:27:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	12:38:28 AM	Recipe started at 12:38 AM
7/27/2011	12:38:28 AM	Helium valve closed
7/27/2011	12:38:28 AM	H2 valve closed
7/27/2011	12:38:28 AM	BCl3 valve closed
7/27/2011	12:38:28 AM	PH3 valve closed
7/27/2011	12:38:28 AM	SiCl4 pre valve closed
7/27/2011	12:38:28 AM	SiCl4 post valve closed
7/27/2011	12:38:28 AM	Bypass valve closed
7/27/2011	12:38:28 AM	Bubbler valve closed
7/27/2011	12:38:28 AM	Main Vac valve opened
7/27/2011	12:38:28 AM	Helium MFC set to  0.000000
7/27/2011	12:38:28 AM	H2 MFC set to  0.000000
7/27/2011	12:38:28 AM	BCl3 MFC set to  0.000000
7/27/2011	12:38:28 AM	PHl3 MFC set to  0.000000
7/27/2011	12:38:28 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:38:28 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:38:28 AM	Tube furnace set to 0
7/27/2011	12:38:58 AM	H2 valve closed
7/27/2011	12:38:58 AM	BCl3 valve closed
7/27/2011	12:38:58 AM	PH3 valve closed
7/27/2011	12:38:58 AM	SiCl4 pre valve closed
7/27/2011	12:38:58 AM	SiCl4 post valve closed
7/27/2011	12:38:58 AM	Bypass valve closed
7/27/2011	12:38:58 AM	Bubbler valve closed
7/27/2011	12:38:58 AM	Helium valve opened
7/27/2011	12:38:58 AM	Main Vac valve opened
7/27/2011	12:38:58 AM	Helium MFC set to  20.000000
7/27/2011	12:38:58 AM	H2 MFC set to  0.000000
7/27/2011	12:38:58 AM	BCl3 MFC set to  0.000000
7/27/2011	12:38:58 AM	PHl3 MFC set to  0.000000
7/27/2011	12:38:58 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:38:58 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:38:58 AM	Tube furnace set to 0
7/27/2011	12:39:28 AM	Helium valve closed
7/27/2011	12:39:28 AM	H2 valve closed
7/27/2011	12:39:28 AM	BCl3 valve closed
7/27/2011	12:39:28 AM	PH3 valve closed
7/27/2011	12:39:28 AM	SiCl4 pre valve closed
7/27/2011	12:39:28 AM	SiCl4 post valve closed
7/27/2011	12:39:28 AM	Bypass valve closed
7/27/2011	12:39:28 AM	Bubbler valve closed
7/27/2011	12:39:28 AM	Main Vac valve opened
7/27/2011	12:39:28 AM	Helium MFC set to  0.000000
7/27/2011	12:39:28 AM	H2 MFC set to  0.000000
7/27/2011	12:39:28 AM	BCl3 MFC set to  0.000000
7/27/2011	12:39:28 AM	PHl3 MFC set to  0.000000
7/27/2011	12:39:28 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:39:28 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:39:29 AM	Tube furnace set to 0
7/27/2011	12:39:59 AM	H2 valve closed
7/27/2011	12:39:59 AM	BCl3 valve closed
7/27/2011	12:39:59 AM	PH3 valve closed
7/27/2011	12:39:59 AM	SiCl4 pre valve closed
7/27/2011	12:39:59 AM	SiCl4 post valve closed
7/27/2011	12:39:59 AM	Bypass valve closed
7/27/2011	12:39:59 AM	Bubbler valve closed
7/27/2011	12:39:59 AM	Helium valve opened
7/27/2011	12:39:59 AM	Main Vac valve opened
7/27/2011	12:39:59 AM	Helium MFC set to  20.000000
7/27/2011	12:39:59 AM	H2 MFC set to  0.000000
7/27/2011	12:39:59 AM	BCl3 MFC set to  0.000000
7/27/2011	12:39:59 AM	PHl3 MFC set to  0.000000
7/27/2011	12:39:59 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:39:59 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:39:59 AM	Tube furnace set to 0
7/27/2011	12:40:29 AM	Helium valve closed
7/27/2011	12:40:29 AM	H2 valve closed
7/27/2011	12:40:29 AM	BCl3 valve closed
7/27/2011	12:40:29 AM	PH3 valve closed
7/27/2011	12:40:29 AM	SiCl4 pre valve closed
7/27/2011	12:40:29 AM	SiCl4 post valve closed
7/27/2011	12:40:29 AM	Bypass valve closed
7/27/2011	12:40:29 AM	Bubbler valve closed
7/27/2011	12:40:29 AM	Main Vac valve opened
7/27/2011	12:40:29 AM	Helium MFC set to  0.000000
7/27/2011	12:40:29 AM	H2 MFC set to  0.000000
7/27/2011	12:40:29 AM	BCl3 MFC set to  0.000000
7/27/2011	12:40:29 AM	PHl3 MFC set to  0.000000
7/27/2011	12:40:29 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:40:29 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:40:29 AM	Tube furnace set to 0
7/27/2011	12:40:59 AM	H2 valve closed
7/27/2011	12:40:59 AM	BCl3 valve closed
7/27/2011	12:40:59 AM	PH3 valve closed
7/27/2011	12:40:59 AM	SiCl4 pre valve closed
7/27/2011	12:40:59 AM	SiCl4 post valve closed
7/27/2011	12:40:59 AM	Bypass valve closed
7/27/2011	12:40:59 AM	Bubbler valve closed
7/27/2011	12:40:59 AM	Helium valve opened
7/27/2011	12:40:59 AM	Main Vac valve opened
7/27/2011	12:40:59 AM	Helium MFC set to  20.000000
7/27/2011	12:40:59 AM	H2 MFC set to  0.000000
7/27/2011	12:40:59 AM	BCl3 MFC set to  0.000000
7/27/2011	12:40:59 AM	PHl3 MFC set to  0.000000
7/27/2011	12:40:59 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:40:59 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:40:59 AM	Tube furnace set to 0
7/27/2011	12:41:29 AM	Helium valve closed
7/27/2011	12:41:29 AM	H2 valve closed
7/27/2011	12:41:29 AM	BCl3 valve closed
7/27/2011	12:41:29 AM	PH3 valve closed
7/27/2011	12:41:29 AM	SiCl4 pre valve closed
7/27/2011	12:41:29 AM	SiCl4 post valve closed
7/27/2011	12:41:29 AM	Bypass valve closed
7/27/2011	12:41:29 AM	Bubbler valve closed
7/27/2011	12:41:29 AM	Main Vac valve opened
7/27/2011	12:41:29 AM	Helium MFC set to  0.000000
7/27/2011	12:41:29 AM	H2 MFC set to  0.000000
7/27/2011	12:41:29 AM	BCl3 MFC set to  0.000000
7/27/2011	12:41:29 AM	PHl3 MFC set to  0.000000
7/27/2011	12:41:29 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:41:29 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:41:29 AM	Tube furnace set to 0
7/27/2011	12:41:59 AM	H2 valve closed
7/27/2011	12:41:59 AM	BCl3 valve closed
7/27/2011	12:41:59 AM	PH3 valve closed
7/27/2011	12:41:59 AM	SiCl4 pre valve closed
7/27/2011	12:41:59 AM	SiCl4 post valve closed
7/27/2011	12:41:59 AM	Bypass valve closed
7/27/2011	12:41:59 AM	Bubbler valve closed
7/27/2011	12:41:59 AM	Helium valve opened
7/27/2011	12:41:59 AM	Main Vac valve opened
7/27/2011	12:41:59 AM	Helium MFC set to  20.000000
7/27/2011	12:41:59 AM	H2 MFC set to  0.000000
7/27/2011	12:41:59 AM	BCl3 MFC set to  0.000000
7/27/2011	12:41:59 AM	PHl3 MFC set to  0.000000
7/27/2011	12:41:59 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:41:59 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:42:00 AM	Tube furnace set to 0
7/27/2011	12:42:30 AM	Helium valve closed
7/27/2011	12:42:30 AM	H2 valve closed
7/27/2011	12:42:30 AM	BCl3 valve closed
7/27/2011	12:42:30 AM	PH3 valve closed
7/27/2011	12:42:30 AM	SiCl4 pre valve closed
7/27/2011	12:42:30 AM	SiCl4 post valve closed
7/27/2011	12:42:30 AM	Bypass valve closed
7/27/2011	12:42:30 AM	Bubbler valve closed
7/27/2011	12:42:30 AM	Main Vac valve opened
7/27/2011	12:42:30 AM	Helium MFC set to  0.000000
7/27/2011	12:42:30 AM	H2 MFC set to  0.000000
7/27/2011	12:42:30 AM	BCl3 MFC set to  0.000000
7/27/2011	12:42:30 AM	PHl3 MFC set to  0.000000
7/27/2011	12:42:30 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:42:30 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:42:30 AM	Tube furnace set to 0
7/27/2011	12:43:00 AM	H2 valve closed
7/27/2011	12:43:00 AM	BCl3 valve closed
7/27/2011	12:43:00 AM	PH3 valve closed
7/27/2011	12:43:00 AM	SiCl4 pre valve closed
7/27/2011	12:43:00 AM	SiCl4 post valve closed
7/27/2011	12:43:00 AM	Bypass valve closed
7/27/2011	12:43:00 AM	Bubbler valve closed
7/27/2011	12:43:00 AM	Helium valve opened
7/27/2011	12:43:00 AM	Main Vac valve opened
7/27/2011	12:43:00 AM	Helium MFC set to  20.000000
7/27/2011	12:43:00 AM	H2 MFC set to  0.000000
7/27/2011	12:43:00 AM	BCl3 MFC set to  0.000000
7/27/2011	12:43:00 AM	PHl3 MFC set to  0.000000
7/27/2011	12:43:00 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:43:00 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:43:00 AM	Tube furnace set to 0
7/27/2011	12:43:30 AM	Helium valve closed
7/27/2011	12:43:30 AM	H2 valve closed
7/27/2011	12:43:30 AM	BCl3 valve closed
7/27/2011	12:43:30 AM	PH3 valve closed
7/27/2011	12:43:30 AM	SiCl4 pre valve closed
7/27/2011	12:43:30 AM	SiCl4 post valve closed
7/27/2011	12:43:30 AM	Bypass valve closed
7/27/2011	12:43:30 AM	Bubbler valve closed
7/27/2011	12:43:30 AM	Main Vac valve opened
7/27/2011	12:43:30 AM	Helium MFC set to  0.000000
7/27/2011	12:43:30 AM	H2 MFC set to  0.000000
7/27/2011	12:43:30 AM	BCl3 MFC set to  0.000000
7/27/2011	12:43:30 AM	PHl3 MFC set to  0.000000
7/27/2011	12:43:30 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:43:30 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:43:30 AM	Tube furnace set to 0
7/27/2011	12:44:00 AM	H2 valve closed
7/27/2011	12:44:00 AM	BCl3 valve closed
7/27/2011	12:44:00 AM	PH3 valve closed
7/27/2011	12:44:00 AM	SiCl4 pre valve closed
7/27/2011	12:44:00 AM	SiCl4 post valve closed
7/27/2011	12:44:00 AM	Bypass valve closed
7/27/2011	12:44:00 AM	Bubbler valve closed
7/27/2011	12:44:00 AM	Helium valve opened
7/27/2011	12:44:00 AM	Main Vac valve opened
7/27/2011	12:44:00 AM	Helium MFC set to  20.000000
7/27/2011	12:44:00 AM	H2 MFC set to  0.000000
7/27/2011	12:44:00 AM	BCl3 MFC set to  0.000000
7/27/2011	12:44:00 AM	PHl3 MFC set to  0.000000
7/27/2011	12:44:00 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:44:00 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:44:00 AM	Tube furnace set to 0
7/27/2011	12:44:30 AM	Helium valve closed
7/27/2011	12:44:30 AM	H2 valve closed
7/27/2011	12:44:30 AM	BCl3 valve closed
7/27/2011	12:44:30 AM	PH3 valve closed
7/27/2011	12:44:30 AM	SiCl4 pre valve closed
7/27/2011	12:44:30 AM	SiCl4 post valve closed
7/27/2011	12:44:30 AM	Bypass valve closed
7/27/2011	12:44:30 AM	Bubbler valve closed
7/27/2011	12:44:30 AM	Main Vac valve opened
7/27/2011	12:44:30 AM	Helium MFC set to  0.000000
7/27/2011	12:44:30 AM	H2 MFC set to  0.000000
7/27/2011	12:44:30 AM	BCl3 MFC set to  0.000000
7/27/2011	12:44:30 AM	PHl3 MFC set to  0.000000
7/27/2011	12:44:30 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:44:30 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:44:31 AM	Tube furnace set to 0
7/27/2011	12:45:01 AM	H2 valve closed
7/27/2011	12:45:01 AM	BCl3 valve closed
7/27/2011	12:45:01 AM	PH3 valve closed
7/27/2011	12:45:01 AM	SiCl4 pre valve closed
7/27/2011	12:45:01 AM	SiCl4 post valve closed
7/27/2011	12:45:01 AM	Bypass valve closed
7/27/2011	12:45:01 AM	Bubbler valve closed
7/27/2011	12:45:01 AM	Helium valve opened
7/27/2011	12:45:01 AM	Main Vac valve opened
7/27/2011	12:45:01 AM	Helium MFC set to  20.000000
7/27/2011	12:45:01 AM	H2 MFC set to  0.000000
7/27/2011	12:45:01 AM	BCl3 MFC set to  0.000000
7/27/2011	12:45:01 AM	PHl3 MFC set to  0.000000
7/27/2011	12:45:01 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:45:01 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:45:01 AM	Tube furnace set to 0
7/27/2011	12:45:31 AM	Helium valve closed
7/27/2011	12:45:31 AM	H2 valve closed
7/27/2011	12:45:31 AM	BCl3 valve closed
7/27/2011	12:45:31 AM	PH3 valve closed
7/27/2011	12:45:31 AM	SiCl4 pre valve closed
7/27/2011	12:45:31 AM	SiCl4 post valve closed
7/27/2011	12:45:31 AM	Bypass valve closed
7/27/2011	12:45:31 AM	Bubbler valve closed
7/27/2011	12:45:31 AM	Main Vac valve opened
7/27/2011	12:45:31 AM	Helium MFC set to  0.000000
7/27/2011	12:45:31 AM	H2 MFC set to  0.000000
7/27/2011	12:45:31 AM	BCl3 MFC set to  0.000000
7/27/2011	12:45:31 AM	PHl3 MFC set to  0.000000
7/27/2011	12:45:31 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:45:31 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:45:31 AM	Tube furnace set to 0
7/27/2011	12:46:01 AM	H2 valve closed
7/27/2011	12:46:01 AM	BCl3 valve closed
7/27/2011	12:46:01 AM	PH3 valve closed
7/27/2011	12:46:01 AM	SiCl4 pre valve closed
7/27/2011	12:46:01 AM	SiCl4 post valve closed
7/27/2011	12:46:01 AM	Bypass valve closed
7/27/2011	12:46:01 AM	Bubbler valve closed
7/27/2011	12:46:01 AM	Helium valve opened
7/27/2011	12:46:01 AM	Main Vac valve opened
7/27/2011	12:46:01 AM	Helium MFC set to  20.000000
7/27/2011	12:46:01 AM	H2 MFC set to  0.000000
7/27/2011	12:46:01 AM	BCl3 MFC set to  0.000000
7/27/2011	12:46:01 AM	PHl3 MFC set to  0.000000
7/27/2011	12:46:01 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:46:01 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:46:01 AM	Tube furnace set to 0
7/27/2011	12:46:31 AM	Helium valve closed
7/27/2011	12:46:31 AM	H2 valve closed
7/27/2011	12:46:31 AM	BCl3 valve closed
7/27/2011	12:46:31 AM	PH3 valve closed
7/27/2011	12:46:31 AM	SiCl4 pre valve closed
7/27/2011	12:46:31 AM	SiCl4 post valve closed
7/27/2011	12:46:31 AM	Bypass valve closed
7/27/2011	12:46:31 AM	Bubbler valve closed
7/27/2011	12:46:31 AM	Main Vac valve opened
7/27/2011	12:46:31 AM	Helium MFC set to  0.000000
7/27/2011	12:46:31 AM	H2 MFC set to  0.000000
7/27/2011	12:46:31 AM	BCl3 MFC set to  0.000000
7/27/2011	12:46:31 AM	PHl3 MFC set to  0.000000
7/27/2011	12:46:31 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:46:31 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:46:31 AM	Tube furnace set to 0
7/27/2011	12:47:01 AM	H2 valve closed
7/27/2011	12:47:01 AM	BCl3 valve closed
7/27/2011	12:47:01 AM	PH3 valve closed
7/27/2011	12:47:01 AM	SiCl4 pre valve closed
7/27/2011	12:47:02 AM	SiCl4 post valve closed
7/27/2011	12:47:02 AM	Bypass valve closed
7/27/2011	12:47:02 AM	Bubbler valve closed
7/27/2011	12:47:02 AM	Helium valve opened
7/27/2011	12:47:02 AM	Main Vac valve opened
7/27/2011	12:47:02 AM	Helium MFC set to  20.000000
7/27/2011	12:47:02 AM	H2 MFC set to  0.000000
7/27/2011	12:47:02 AM	BCl3 MFC set to  0.000000
7/27/2011	12:47:02 AM	PHl3 MFC set to  0.000000
7/27/2011	12:47:02 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:47:02 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:47:02 AM	Tube furnace set to 0
7/27/2011	12:47:32 AM	Helium valve closed
7/27/2011	12:47:32 AM	H2 valve closed
7/27/2011	12:47:32 AM	BCl3 valve closed
7/27/2011	12:47:32 AM	PH3 valve closed
7/27/2011	12:47:32 AM	SiCl4 pre valve closed
7/27/2011	12:47:32 AM	SiCl4 post valve closed
7/27/2011	12:47:32 AM	Bypass valve closed
7/27/2011	12:47:32 AM	Bubbler valve closed
7/27/2011	12:47:32 AM	Main Vac valve opened
7/27/2011	12:47:32 AM	Helium MFC set to  0.000000
7/27/2011	12:47:32 AM	H2 MFC set to  0.000000
7/27/2011	12:47:32 AM	BCl3 MFC set to  0.000000
7/27/2011	12:47:32 AM	PHl3 MFC set to  0.000000
7/27/2011	12:47:32 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:47:32 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:47:32 AM	Tube furnace set to 200
7/27/2011	12:48:02 AM	H2 valve closed
7/27/2011	12:48:02 AM	BCl3 valve closed
7/27/2011	12:48:02 AM	PH3 valve closed
7/27/2011	12:48:02 AM	SiCl4 pre valve closed
7/27/2011	12:48:02 AM	SiCl4 post valve closed
7/27/2011	12:48:02 AM	Bypass valve closed
7/27/2011	12:48:02 AM	Bubbler valve closed
7/27/2011	12:48:02 AM	Helium valve opened
7/27/2011	12:48:02 AM	Main Vac valve opened
7/27/2011	12:48:02 AM	Helium MFC set to  20.000000
7/27/2011	12:48:02 AM	H2 MFC set to  0.000000
7/27/2011	12:48:02 AM	BCl3 MFC set to  0.000000
7/27/2011	12:48:02 AM	PHl3 MFC set to  0.000000
7/27/2011	12:48:02 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:48:02 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:48:02 AM	Tube furnace set to 200
7/27/2011	12:48:32 AM	Helium valve closed
7/27/2011	12:48:32 AM	H2 valve closed
7/27/2011	12:48:32 AM	BCl3 valve closed
7/27/2011	12:48:32 AM	PH3 valve closed
7/27/2011	12:48:32 AM	SiCl4 pre valve closed
7/27/2011	12:48:32 AM	SiCl4 post valve closed
7/27/2011	12:48:32 AM	Bypass valve closed
7/27/2011	12:48:32 AM	Bubbler valve closed
7/27/2011	12:48:32 AM	Main Vac valve opened
7/27/2011	12:48:32 AM	Helium MFC set to  0.000000
7/27/2011	12:48:32 AM	H2 MFC set to  0.000000
7/27/2011	12:48:32 AM	BCl3 MFC set to  0.000000
7/27/2011	12:48:32 AM	PHl3 MFC set to  0.000000
7/27/2011	12:48:32 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:48:32 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:48:32 AM	Tube furnace set to 200
7/27/2011	12:49:02 AM	H2 valve closed
7/27/2011	12:49:02 AM	BCl3 valve closed
7/27/2011	12:49:02 AM	PH3 valve closed
7/27/2011	12:49:02 AM	SiCl4 pre valve closed
7/27/2011	12:49:02 AM	SiCl4 post valve closed
7/27/2011	12:49:02 AM	Bypass valve closed
7/27/2011	12:49:02 AM	Bubbler valve closed
7/27/2011	12:49:02 AM	Helium valve opened
7/27/2011	12:49:02 AM	Main Vac valve opened
7/27/2011	12:49:02 AM	Helium MFC set to  20.000000
7/27/2011	12:49:02 AM	H2 MFC set to  0.000000
7/27/2011	12:49:02 AM	BCl3 MFC set to  0.000000
7/27/2011	12:49:02 AM	PHl3 MFC set to  0.000000
7/27/2011	12:49:02 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:49:02 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:49:03 AM	Tube furnace set to 200
7/27/2011	12:49:33 AM	Helium valve closed
7/27/2011	12:49:33 AM	H2 valve closed
7/27/2011	12:49:33 AM	BCl3 valve closed
7/27/2011	12:49:33 AM	PH3 valve closed
7/27/2011	12:49:33 AM	SiCl4 pre valve closed
7/27/2011	12:49:33 AM	SiCl4 post valve closed
7/27/2011	12:49:33 AM	Bypass valve closed
7/27/2011	12:49:33 AM	Bubbler valve closed
7/27/2011	12:49:33 AM	Main Vac valve opened
7/27/2011	12:49:33 AM	Helium MFC set to  0.000000
7/27/2011	12:49:33 AM	H2 MFC set to  0.000000
7/27/2011	12:49:33 AM	BCl3 MFC set to  0.000000
7/27/2011	12:49:33 AM	PHl3 MFC set to  0.000000
7/27/2011	12:49:33 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:49:33 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:49:33 AM	Tube furnace set to 200
7/27/2011	12:50:03 AM	H2 valve closed
7/27/2011	12:50:03 AM	BCl3 valve closed
7/27/2011	12:50:03 AM	PH3 valve closed
7/27/2011	12:50:03 AM	SiCl4 pre valve closed
7/27/2011	12:50:03 AM	SiCl4 post valve closed
7/27/2011	12:50:03 AM	Bypass valve closed
7/27/2011	12:50:03 AM	Bubbler valve closed
7/27/2011	12:50:03 AM	Helium valve opened
7/27/2011	12:50:03 AM	Main Vac valve opened
7/27/2011	12:50:03 AM	Helium MFC set to  20.000000
7/27/2011	12:50:03 AM	H2 MFC set to  0.000000
7/27/2011	12:50:03 AM	BCl3 MFC set to  0.000000
7/27/2011	12:50:03 AM	PHl3 MFC set to  0.000000
7/27/2011	12:50:03 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:50:03 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:50:03 AM	Tube furnace set to 200
7/27/2011	12:50:33 AM	Helium valve closed
7/27/2011	12:50:33 AM	H2 valve closed
7/27/2011	12:50:33 AM	BCl3 valve closed
7/27/2011	12:50:33 AM	PH3 valve closed
7/27/2011	12:50:33 AM	SiCl4 pre valve closed
7/27/2011	12:50:33 AM	SiCl4 post valve closed
7/27/2011	12:50:33 AM	Bypass valve closed
7/27/2011	12:50:33 AM	Bubbler valve closed
7/27/2011	12:50:33 AM	Main Vac valve opened
7/27/2011	12:50:33 AM	Helium MFC set to  0.000000
7/27/2011	12:50:33 AM	H2 MFC set to  0.000000
7/27/2011	12:50:33 AM	BCl3 MFC set to  0.000000
7/27/2011	12:50:33 AM	PHl3 MFC set to  0.000000
7/27/2011	12:50:33 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:50:33 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:50:33 AM	Tube furnace set to 200
7/27/2011	12:51:03 AM	H2 valve closed
7/27/2011	12:51:03 AM	BCl3 valve closed
7/27/2011	12:51:03 AM	PH3 valve closed
7/27/2011	12:51:03 AM	SiCl4 pre valve closed
7/27/2011	12:51:03 AM	SiCl4 post valve closed
7/27/2011	12:51:03 AM	Bypass valve closed
7/27/2011	12:51:03 AM	Bubbler valve closed
7/27/2011	12:51:03 AM	Helium valve opened
7/27/2011	12:51:03 AM	Main Vac valve opened
7/27/2011	12:51:03 AM	Helium MFC set to  20.000000
7/27/2011	12:51:03 AM	H2 MFC set to  0.000000
7/27/2011	12:51:03 AM	BCl3 MFC set to  0.000000
7/27/2011	12:51:03 AM	PHl3 MFC set to  0.000000
7/27/2011	12:51:03 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:51:03 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:51:03 AM	Tube furnace set to 200
7/27/2011	12:51:33 AM	Helium valve closed
7/27/2011	12:51:33 AM	H2 valve closed
7/27/2011	12:51:33 AM	BCl3 valve closed
7/27/2011	12:51:33 AM	PH3 valve closed
7/27/2011	12:51:33 AM	SiCl4 pre valve closed
7/27/2011	12:51:33 AM	SiCl4 post valve closed
7/27/2011	12:51:33 AM	Bypass valve closed
7/27/2011	12:51:33 AM	Bubbler valve closed
7/27/2011	12:51:33 AM	Main Vac valve opened
7/27/2011	12:51:33 AM	Helium MFC set to  0.000000
7/27/2011	12:51:33 AM	H2 MFC set to  0.000000
7/27/2011	12:51:33 AM	BCl3 MFC set to  0.000000
7/27/2011	12:51:33 AM	PHl3 MFC set to  0.000000
7/27/2011	12:51:33 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:51:33 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:51:34 AM	Tube furnace set to 200
7/27/2011	12:52:04 AM	H2 valve closed
7/27/2011	12:52:04 AM	BCl3 valve closed
7/27/2011	12:52:04 AM	PH3 valve closed
7/27/2011	12:52:04 AM	SiCl4 pre valve closed
7/27/2011	12:52:04 AM	SiCl4 post valve closed
7/27/2011	12:52:04 AM	Bypass valve closed
7/27/2011	12:52:04 AM	Bubbler valve closed
7/27/2011	12:52:04 AM	Helium valve opened
7/27/2011	12:52:04 AM	Main Vac valve opened
7/27/2011	12:52:04 AM	Helium MFC set to  20.000000
7/27/2011	12:52:04 AM	H2 MFC set to  0.000000
7/27/2011	12:52:04 AM	BCl3 MFC set to  0.000000
7/27/2011	12:52:04 AM	PHl3 MFC set to  0.000000
7/27/2011	12:52:04 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:52:04 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:52:04 AM	Tube furnace set to 200
7/27/2011	12:52:34 AM	Helium valve closed
7/27/2011	12:52:34 AM	H2 valve closed
7/27/2011	12:52:34 AM	BCl3 valve closed
7/27/2011	12:52:34 AM	PH3 valve closed
7/27/2011	12:52:34 AM	SiCl4 pre valve closed
7/27/2011	12:52:34 AM	SiCl4 post valve closed
7/27/2011	12:52:34 AM	Bypass valve closed
7/27/2011	12:52:34 AM	Bubbler valve closed
7/27/2011	12:52:34 AM	Main Vac valve opened
7/27/2011	12:52:34 AM	Helium MFC set to  0.000000
7/27/2011	12:52:34 AM	H2 MFC set to  0.000000
7/27/2011	12:52:34 AM	BCl3 MFC set to  0.000000
7/27/2011	12:52:34 AM	PHl3 MFC set to  0.000000
7/27/2011	12:52:34 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:52:34 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:52:34 AM	Tube furnace set to 200
7/27/2011	12:53:04 AM	H2 valve closed
7/27/2011	12:53:04 AM	BCl3 valve closed
7/27/2011	12:53:04 AM	PH3 valve closed
7/27/2011	12:53:04 AM	SiCl4 pre valve closed
7/27/2011	12:53:04 AM	SiCl4 post valve closed
7/27/2011	12:53:04 AM	Bypass valve closed
7/27/2011	12:53:04 AM	Bubbler valve closed
7/27/2011	12:53:04 AM	Helium valve opened
7/27/2011	12:53:04 AM	Main Vac valve opened
7/27/2011	12:53:04 AM	Helium MFC set to  20.000000
7/27/2011	12:53:04 AM	H2 MFC set to  0.000000
7/27/2011	12:53:04 AM	BCl3 MFC set to  0.000000
7/27/2011	12:53:04 AM	PHl3 MFC set to  0.000000
7/27/2011	12:53:04 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:53:04 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:53:04 AM	Tube furnace set to 200
7/27/2011	12:53:34 AM	Helium valve closed
7/27/2011	12:53:34 AM	H2 valve closed
7/27/2011	12:53:34 AM	BCl3 valve closed
7/27/2011	12:53:34 AM	PH3 valve closed
7/27/2011	12:53:34 AM	SiCl4 pre valve closed
7/27/2011	12:53:34 AM	SiCl4 post valve closed
7/27/2011	12:53:34 AM	Bypass valve closed
7/27/2011	12:53:34 AM	Bubbler valve closed
7/27/2011	12:53:34 AM	Main Vac valve opened
7/27/2011	12:53:34 AM	Helium MFC set to  0.000000
7/27/2011	12:53:34 AM	H2 MFC set to  0.000000
7/27/2011	12:53:34 AM	BCl3 MFC set to  0.000000
7/27/2011	12:53:34 AM	PHl3 MFC set to  0.000000
7/27/2011	12:53:34 AM	SiCl4 MFC set to  0.000000
7/27/2011	12:53:34 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	12:53:34 AM	Tube furnace set to 0
7/27/2011	12:53:35 AM	Run finished at 12:53 AM
7/27/2011	1:05:29 AM	Main Vac valve closed
7/27/2011	1:05:41 AM	Main Vac valve opened
7/27/2011	1:06:33 AM	Recipe started at 1:06 AM
7/27/2011	1:06:33 AM	Helium valve closed
7/27/2011	1:06:33 AM	H2 valve closed
7/27/2011	1:06:33 AM	BCl3 valve closed
7/27/2011	1:06:33 AM	PH3 valve closed
7/27/2011	1:06:33 AM	SiCl4 pre valve closed
7/27/2011	1:06:33 AM	SiCl4 post valve closed
7/27/2011	1:06:33 AM	Main Vac valve closed
7/27/2011	1:06:33 AM	Bypass valve closed
7/27/2011	1:06:33 AM	Bubbler valve closed
7/27/2011	1:06:33 AM	Helium MFC set to  0.000000
7/27/2011	1:06:33 AM	H2 MFC set to  0.000000
7/27/2011	1:06:33 AM	BCl3 MFC set to  0.000000
7/27/2011	1:06:33 AM	PHl3 MFC set to  0.000000
7/27/2011	1:06:33 AM	SiCl4 MFC set to  0.000000
7/27/2011	1:06:33 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	1:06:33 AM	Tube furnace set to 0
7/27/2011	1:06:36 AM	Helium valve closed
7/27/2011	1:06:36 AM	BCl3 valve closed
7/27/2011	1:06:36 AM	PH3 valve closed
7/27/2011	1:06:36 AM	SiCl4 pre valve closed
7/27/2011	1:06:36 AM	SiCl4 post valve closed
7/27/2011	1:06:36 AM	Main Vac valve closed
7/27/2011	1:06:36 AM	Bypass valve closed
7/27/2011	1:06:36 AM	Bubbler valve closed
7/27/2011	1:06:36 AM	H2 valve opened
7/27/2011	1:06:36 AM	Helium MFC set to  0.000000
7/27/2011	1:06:36 AM	H2 MFC set to  500.000000
7/27/2011	1:06:36 AM	BCl3 MFC set to  0.000000
7/27/2011	1:06:36 AM	PHl3 MFC set to  0.000000
7/27/2011	1:06:36 AM	SiCl4 MFC set to  0.000000
7/27/2011	1:06:36 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	1:06:36 AM	Tube furnace set to 0
7/27/2011	1:07:40 AM	Helium valve closed
7/27/2011	1:07:40 AM	BCl3 valve closed
7/27/2011	1:07:40 AM	PH3 valve closed
7/27/2011	1:07:40 AM	SiCl4 pre valve closed
7/27/2011	1:07:40 AM	SiCl4 post valve closed
7/27/2011	1:07:40 AM	Main Vac valve closed
7/27/2011	1:07:40 AM	Bypass valve closed
7/27/2011	1:07:40 AM	H2 valve opened
7/27/2011	1:07:40 AM	Bubbler valve opened
7/27/2011	1:07:40 AM	Helium MFC set to  0.000000
7/27/2011	1:07:40 AM	H2 MFC set to  500.000000
7/27/2011	1:07:40 AM	BCl3 MFC set to  0.000000
7/27/2011	1:07:40 AM	PHl3 MFC set to  0.000000
7/27/2011	1:07:40 AM	SiCl4 MFC set to  0.000000
7/27/2011	1:07:40 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	1:07:40 AM	Tube furnace set to 0
7/27/2011	1:07:41 AM	Helium valve closed
7/27/2011	1:07:41 AM	BCl3 valve closed
7/27/2011	1:07:41 AM	PH3 valve closed
7/27/2011	1:07:41 AM	SiCl4 pre valve closed
7/27/2011	1:07:41 AM	SiCl4 post valve closed
7/27/2011	1:07:41 AM	Main Vac valve closed
7/27/2011	1:07:41 AM	Bypass valve closed
7/27/2011	1:07:41 AM	H2 valve opened
7/27/2011	1:07:41 AM	Bubbler valve opened
7/27/2011	1:07:41 AM	Helium MFC set to  0.000000
7/27/2011	1:07:41 AM	H2 MFC set to  500.000000
7/27/2011	1:07:41 AM	BCl3 MFC set to  0.000000
7/27/2011	1:07:41 AM	PHl3 MFC set to  0.000000
7/27/2011	1:07:41 AM	SiCl4 MFC set to  0.000000
7/27/2011	1:07:41 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	1:07:41 AM	Tube furnace set to 1000
7/27/2011	1:27:41 AM	Helium valve closed
7/27/2011	1:27:41 AM	BCl3 valve closed
7/27/2011	1:27:41 AM	PH3 valve closed
7/27/2011	1:27:41 AM	Main Vac valve closed
7/27/2011	1:27:41 AM	Bypass valve closed
7/27/2011	1:27:41 AM	H2 valve opened
7/27/2011	1:27:41 AM	SiCl4 pre valve opened
7/27/2011	1:27:41 AM	SiCl4 post valve opened
7/27/2011	1:27:41 AM	Bubbler valve opened
7/27/2011	1:27:41 AM	Helium MFC set to  0.000000
7/27/2011	1:27:41 AM	H2 MFC set to  500.000000
7/27/2011	1:27:41 AM	BCl3 MFC set to  0.000000
7/27/2011	1:27:41 AM	PHl3 MFC set to  0.000000
7/27/2011	1:27:41 AM	SiCl4 MFC set to  50.000000
7/27/2011	1:27:41 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	1:27:41 AM	Tube furnace set to 1000
7/27/2011	1:37:41 AM	Helium valve closed
7/27/2011	1:37:41 AM	BCl3 valve closed
7/27/2011	1:37:41 AM	SiCl4 pre valve closed
7/27/2011	1:37:41 AM	SiCl4 post valve closed
7/27/2011	1:37:41 AM	Main Vac valve closed
7/27/2011	1:37:41 AM	Bypass valve closed
7/27/2011	1:37:41 AM	H2 valve opened
7/27/2011	1:37:41 AM	PH3 valve opened
7/27/2011	1:37:41 AM	Bubbler valve opened
7/27/2011	1:37:41 AM	Helium MFC set to  0.000000
7/27/2011	1:37:41 AM	H2 MFC set to  500.000000
7/27/2011	1:37:41 AM	BCl3 MFC set to  0.000000
7/27/2011	1:37:41 AM	PHl3 MFC set to  1.000000
7/27/2011	1:37:41 AM	SiCl4 MFC set to  0.000000
7/27/2011	1:37:41 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	1:37:41 AM	Tube furnace set to 1000
7/27/2011	1:53:42 AM	Helium valve closed
7/27/2011	1:53:42 AM	BCl3 valve closed
7/27/2011	1:53:42 AM	PH3 valve closed
7/27/2011	1:53:42 AM	SiCl4 pre valve closed
7/27/2011	1:53:42 AM	SiCl4 post valve closed
7/27/2011	1:53:42 AM	Main Vac valve closed
7/27/2011	1:53:42 AM	Bypass valve closed
7/27/2011	1:53:42 AM	H2 valve opened
7/27/2011	1:53:42 AM	Bubbler valve opened
7/27/2011	1:53:42 AM	Helium MFC set to  0.000000
7/27/2011	1:53:42 AM	H2 MFC set to  500.000000
7/27/2011	1:53:42 AM	BCl3 MFC set to  0.000000
7/27/2011	1:53:42 AM	PHl3 MFC set to  0.000000
7/27/2011	1:53:42 AM	SiCl4 MFC set to  0.000000
7/27/2011	1:53:42 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	1:53:42 AM	Tube furnace set to 950
7/27/2011	1:55:42 AM	Helium valve closed
7/27/2011	1:55:42 AM	BCl3 valve closed
7/27/2011	1:55:42 AM	PH3 valve closed
7/27/2011	1:55:42 AM	SiCl4 pre valve closed
7/27/2011	1:55:42 AM	SiCl4 post valve closed
7/27/2011	1:55:42 AM	Main Vac valve closed
7/27/2011	1:55:42 AM	Bypass valve closed
7/27/2011	1:55:42 AM	H2 valve opened
7/27/2011	1:55:42 AM	Bubbler valve opened
7/27/2011	1:55:42 AM	Helium MFC set to  0.000000
7/27/2011	1:55:42 AM	H2 MFC set to  500.000000
7/27/2011	1:55:42 AM	BCl3 MFC set to  0.000000
7/27/2011	1:55:42 AM	PHl3 MFC set to  0.000000
7/27/2011	1:55:42 AM	SiCl4 MFC set to  0.000000
7/27/2011	1:55:42 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	1:55:42 AM	Tube furnace set to 900
7/27/2011	1:57:42 AM	Helium valve closed
7/27/2011	1:57:42 AM	BCl3 valve closed
7/27/2011	1:57:42 AM	PH3 valve closed
7/27/2011	1:57:42 AM	SiCl4 pre valve closed
7/27/2011	1:57:42 AM	SiCl4 post valve closed
7/27/2011	1:57:42 AM	Main Vac valve closed
7/27/2011	1:57:42 AM	Bypass valve closed
7/27/2011	1:57:42 AM	H2 valve opened
7/27/2011	1:57:42 AM	Bubbler valve opened
7/27/2011	1:57:42 AM	Helium MFC set to  0.000000
7/27/2011	1:57:42 AM	H2 MFC set to  500.000000
7/27/2011	1:57:42 AM	BCl3 MFC set to  0.000000
7/27/2011	1:57:42 AM	PHl3 MFC set to  0.000000
7/27/2011	1:57:42 AM	SiCl4 MFC set to  0.000000
7/27/2011	1:57:42 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	1:57:42 AM	Tube furnace set to 850
7/27/2011	1:59:42 AM	H2 valve closed
7/27/2011	1:59:42 AM	BCl3 valve closed
7/27/2011	1:59:42 AM	PH3 valve closed
7/27/2011	1:59:42 AM	SiCl4 pre valve closed
7/27/2011	1:59:42 AM	SiCl4 post valve closed
7/27/2011	1:59:42 AM	Main Vac valve closed
7/27/2011	1:59:42 AM	Bypass valve closed
7/27/2011	1:59:42 AM	Helium valve opened
7/27/2011	1:59:42 AM	Bubbler valve opened
7/27/2011	1:59:42 AM	Helium MFC set to  500.000000
7/27/2011	1:59:42 AM	H2 MFC set to  0.000000
7/27/2011	1:59:42 AM	BCl3 MFC set to  0.000000
7/27/2011	1:59:42 AM	PHl3 MFC set to  0.000000
7/27/2011	1:59:42 AM	SiCl4 MFC set to  0.000000
7/27/2011	1:59:42 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	1:59:42 AM	Tube furnace set to 800
7/27/2011	2:01:42 AM	H2 valve closed
7/27/2011	2:01:42 AM	BCl3 valve closed
7/27/2011	2:01:42 AM	PH3 valve closed
7/27/2011	2:01:42 AM	SiCl4 pre valve closed
7/27/2011	2:01:42 AM	SiCl4 post valve closed
7/27/2011	2:01:42 AM	Main Vac valve closed
7/27/2011	2:01:42 AM	Bypass valve closed
7/27/2011	2:01:42 AM	Helium valve opened
7/27/2011	2:01:42 AM	Bubbler valve opened
7/27/2011	2:01:42 AM	Helium MFC set to  500.000000
7/27/2011	2:01:42 AM	H2 MFC set to  0.000000
7/27/2011	2:01:42 AM	BCl3 MFC set to  0.000000
7/27/2011	2:01:42 AM	PHl3 MFC set to  0.000000
7/27/2011	2:01:42 AM	SiCl4 MFC set to  0.000000
7/27/2011	2:01:42 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:01:43 AM	Tube furnace set to 750
7/27/2011	2:03:43 AM	H2 valve closed
7/27/2011	2:03:43 AM	BCl3 valve closed
7/27/2011	2:03:43 AM	PH3 valve closed
7/27/2011	2:03:43 AM	SiCl4 pre valve closed
7/27/2011	2:03:43 AM	SiCl4 post valve closed
7/27/2011	2:03:43 AM	Main Vac valve closed
7/27/2011	2:03:43 AM	Bypass valve closed
7/27/2011	2:03:43 AM	Helium valve opened
7/27/2011	2:03:43 AM	Bubbler valve opened
7/27/2011	2:03:43 AM	Helium MFC set to  500.000000
7/27/2011	2:03:43 AM	H2 MFC set to  0.000000
7/27/2011	2:03:43 AM	BCl3 MFC set to  0.000000
7/27/2011	2:03:43 AM	PHl3 MFC set to  0.000000
7/27/2011	2:03:43 AM	SiCl4 MFC set to  0.000000
7/27/2011	2:03:43 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:03:43 AM	Tube furnace set to 0
7/27/2011	2:23:43 AM	Helium valve closed
7/27/2011	2:23:43 AM	H2 valve closed
7/27/2011	2:23:43 AM	BCl3 valve closed
7/27/2011	2:23:43 AM	PH3 valve closed
7/27/2011	2:23:43 AM	SiCl4 pre valve closed
7/27/2011	2:23:43 AM	SiCl4 post valve closed
7/27/2011	2:23:43 AM	Main Vac valve closed
7/27/2011	2:23:43 AM	Bypass valve closed
7/27/2011	2:23:43 AM	Bubbler valve closed
7/27/2011	2:23:43 AM	Helium MFC set to  0.000000
7/27/2011	2:23:43 AM	H2 MFC set to  0.000000
7/27/2011	2:23:43 AM	BCl3 MFC set to  0.000000
7/27/2011	2:23:43 AM	PHl3 MFC set to  0.000000
7/27/2011	2:23:43 AM	SiCl4 MFC set to  0.000000
7/27/2011	2:23:43 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:23:43 AM	Tube furnace set to 0
7/27/2011	2:23:44 AM	Run finished at 2:23 AM
7/27/2011	2:25:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2011	2:25:45 AM	Recipe started at 2:25 AM
7/27/2011	2:25:46 AM	Helium valve closed
7/27/2011	2:25:46 AM	H2 valve closed
7/27/2011	2:25:46 AM	BCl3 valve closed
7/27/2011	2:25:46 AM	PH3 valve closed
7/27/2011	2:25:46 AM	SiCl4 pre valve closed
7/27/2011	2:25:46 AM	SiCl4 post valve closed
7/27/2011	2:25:46 AM	Main Vac valve closed
7/27/2011	2:25:46 AM	Bypass valve closed
7/27/2011	2:25:46 AM	Bubbler valve closed
7/27/2011	2:25:46 AM	Helium MFC set to  0.000000
7/27/2011	2:25:46 AM	H2 MFC set to  0.000000
7/27/2011	2:25:46 AM	BCl3 MFC set to  0.000000
7/27/2011	2:25:46 AM	PHl3 MFC set to  0.000000
7/27/2011	2:25:46 AM	SiCl4 MFC set to  0.000000
7/27/2011	2:25:46 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:25:46 AM	Tube furnace set to 0
7/27/2011	2:25:49 AM	H2 valve closed
7/27/2011	2:25:49 AM	BCl3 valve closed
7/27/2011	2:25:49 AM	PH3 valve closed
7/27/2011	2:25:49 AM	SiCl4 pre valve closed
7/27/2011	2:25:49 AM	SiCl4 post valve closed
7/27/2011	2:25:49 AM	Main Vac valve closed
7/27/2011	2:25:49 AM	Bypass valve closed
7/27/2011	2:25:49 AM	Bubbler valve closed
7/27/2011	2:25:49 AM	Helium valve opened
7/27/2011	2:25:49 AM	Helium MFC set to  500.000000
7/27/2011	2:25:49 AM	H2 MFC set to  0.000000
7/27/2011	2:25:49 AM	BCl3 MFC set to  0.000000
7/27/2011	2:25:49 AM	PHl3 MFC set to  0.000000
7/27/2011	2:25:49 AM	SiCl4 MFC set to  0.000000
7/27/2011	2:25:49 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:25:49 AM	Tube furnace set to 0
7/27/2011	2:25:49 AM	Helium valve closed
7/27/2011	2:25:49 AM	H2 valve closed
7/27/2011	2:25:49 AM	BCl3 valve closed
7/27/2011	2:25:49 AM	PH3 valve closed
7/27/2011	2:25:49 AM	SiCl4 pre valve closed
7/27/2011	2:25:49 AM	SiCl4 post valve closed
7/27/2011	2:25:49 AM	Main Vac valve closed
7/27/2011	2:25:49 AM	Bypass valve closed
7/27/2011	2:25:49 AM	Bubbler valve closed
7/27/2011	2:25:49 AM	Helium MFC set to  0.000000
7/27/2011	2:25:49 AM	H2 MFC set to  0.000000
7/27/2011	2:25:49 AM	BCl3 MFC set to  0.000000
7/27/2011	2:25:49 AM	PHl3 MFC set to  0.000000
7/27/2011	2:25:49 AM	SiCl4 MFC set to  0.000000
7/27/2011	2:25:49 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:25:49 AM	Tube furnace set to 0
7/27/2011	2:25:50 AM	Run finished at 2:25 AM
7/27/2011	2:25:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2011	2:27:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	2:27:50 AM	Recipe started at 2:27 AM
7/27/2011	2:27:50 AM	Helium valve closed
7/27/2011	2:27:50 AM	H2 valve closed
7/27/2011	2:27:50 AM	BCl3 valve closed
7/27/2011	2:27:50 AM	PH3 valve closed
7/27/2011	2:27:50 AM	SiCl4 pre valve closed
7/27/2011	2:27:50 AM	SiCl4 post valve closed
7/27/2011	2:27:50 AM	Main Vac valve closed
7/27/2011	2:27:50 AM	Bubbler valve closed
7/27/2011	2:27:50 AM	Bypass valve opened
7/27/2011	2:27:50 AM	Helium MFC set to  0.000000
7/27/2011	2:27:50 AM	H2 MFC set to  0.000000
7/27/2011	2:27:50 AM	BCl3 MFC set to  0.000000
7/27/2011	2:27:50 AM	PHl3 MFC set to  0.000000
7/27/2011	2:27:50 AM	SiCl4 MFC set to  0.000000
7/27/2011	2:27:50 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:27:50 AM	Tube furnace set to 0
7/27/2011	2:28:52 AM	Helium valve closed
7/27/2011	2:28:52 AM	H2 valve closed
7/27/2011	2:28:52 AM	BCl3 valve closed
7/27/2011	2:28:52 AM	PH3 valve closed
7/27/2011	2:28:52 AM	SiCl4 pre valve closed
7/27/2011	2:28:52 AM	SiCl4 post valve closed
7/27/2011	2:28:52 AM	Main Vac valve closed
7/27/2011	2:28:52 AM	Bubbler valve closed
7/27/2011	2:28:52 AM	Bypass valve opened
7/27/2011	2:28:52 AM	Helium MFC set to  0.000000
7/27/2011	2:28:52 AM	H2 MFC set to  0.000000
7/27/2011	2:28:52 AM	BCl3 MFC set to  0.000000
7/27/2011	2:28:52 AM	PHl3 MFC set to  0.000000
7/27/2011	2:28:52 AM	SiCl4 MFC set to  0.000000
7/27/2011	2:28:52 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:28:52 AM	Tube furnace set to 0
7/27/2011	2:29:52 AM	Helium valve closed
7/27/2011	2:29:52 AM	H2 valve closed
7/27/2011	2:29:52 AM	BCl3 valve closed
7/27/2011	2:29:52 AM	PH3 valve closed
7/27/2011	2:29:52 AM	SiCl4 pre valve closed
7/27/2011	2:29:52 AM	SiCl4 post valve closed
7/27/2011	2:29:52 AM	Bypass valve closed
7/27/2011	2:29:52 AM	Bubbler valve closed
7/27/2011	2:29:52 AM	Main Vac valve opened
7/27/2011	2:29:52 AM	Helium MFC set to  0.000000
7/27/2011	2:29:52 AM	H2 MFC set to  0.000000
7/27/2011	2:29:52 AM	BCl3 MFC set to  0.000000
7/27/2011	2:29:52 AM	PHl3 MFC set to  0.000000
7/27/2011	2:29:52 AM	SiCl4 MFC set to  0.000000
7/27/2011	2:29:52 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:29:52 AM	Tube furnace set to 0
7/27/2011	2:29:53 AM	Run finished at 2:29 AM
7/27/2011	2:29:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	9:35:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2011	9:35:20 AM	Recipe started at 9:35 AM
7/27/2011	9:35:20 AM	Helium valve closed
7/27/2011	9:35:20 AM	H2 valve closed
7/27/2011	9:35:20 AM	BCl3 valve closed
7/27/2011	9:35:21 AM	PH3 valve closed
7/27/2011	9:35:21 AM	SiCl4 pre valve closed
7/27/2011	9:35:21 AM	SiCl4 post valve closed
7/27/2011	9:35:21 AM	Main Vac valve closed
7/27/2011	9:35:21 AM	Bypass valve closed
7/27/2011	9:35:21 AM	Bubbler valve closed
7/27/2011	9:35:21 AM	Helium MFC set to  0.000000
7/27/2011	9:35:21 AM	H2 MFC set to  0.000000
7/27/2011	9:35:21 AM	BCl3 MFC set to  0.000000
7/27/2011	9:35:21 AM	PHl3 MFC set to  0.000000
7/27/2011	9:35:21 AM	SiCl4 MFC set to  0.000000
7/27/2011	9:35:21 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	9:35:21 AM	Tube furnace set to 0
7/27/2011	9:35:24 AM	H2 valve closed
7/27/2011	9:35:24 AM	BCl3 valve closed
7/27/2011	9:35:24 AM	PH3 valve closed
7/27/2011	9:35:24 AM	SiCl4 pre valve closed
7/27/2011	9:35:24 AM	SiCl4 post valve closed
7/27/2011	9:35:24 AM	Main Vac valve closed
7/27/2011	9:35:24 AM	Bypass valve closed
7/27/2011	9:35:24 AM	Bubbler valve closed
7/27/2011	9:35:24 AM	Helium valve opened
7/27/2011	9:35:24 AM	Helium MFC set to  500.000000
7/27/2011	9:35:24 AM	H2 MFC set to  0.000000
7/27/2011	9:35:24 AM	BCl3 MFC set to  0.000000
7/27/2011	9:35:24 AM	PHl3 MFC set to  0.000000
7/27/2011	9:35:24 AM	SiCl4 MFC set to  0.000000
7/27/2011	9:35:24 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	9:35:24 AM	Tube furnace set to 0
7/27/2011	9:36:29 AM	Helium valve closed
7/27/2011	9:36:29 AM	H2 valve closed
7/27/2011	9:36:29 AM	BCl3 valve closed
7/27/2011	9:36:29 AM	PH3 valve closed
7/27/2011	9:36:29 AM	SiCl4 pre valve closed
7/27/2011	9:36:29 AM	SiCl4 post valve closed
7/27/2011	9:36:29 AM	Main Vac valve closed
7/27/2011	9:36:29 AM	Bypass valve closed
7/27/2011	9:36:29 AM	Bubbler valve closed
7/27/2011	9:36:29 AM	Helium MFC set to  0.000000
7/27/2011	9:36:29 AM	H2 MFC set to  0.000000
7/27/2011	9:36:29 AM	BCl3 MFC set to  0.000000
7/27/2011	9:36:29 AM	PHl3 MFC set to  0.000000
7/27/2011	9:36:29 AM	SiCl4 MFC set to  0.000000
7/27/2011	9:36:29 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	9:36:29 AM	Tube furnace set to 0
7/27/2011	9:36:30 AM	Run finished at 9:36 AM
7/27/2011	9:36:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2011	9:42:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	9:42:03 AM	Recipe started at 9:42 AM
7/27/2011	9:42:03 AM	Helium valve closed
7/27/2011	9:42:03 AM	H2 valve closed
7/27/2011	9:42:03 AM	BCl3 valve closed
7/27/2011	9:42:03 AM	PH3 valve closed
7/27/2011	9:42:03 AM	SiCl4 pre valve closed
7/27/2011	9:42:03 AM	SiCl4 post valve closed
7/27/2011	9:42:03 AM	Main Vac valve closed
7/27/2011	9:42:03 AM	Bubbler valve closed
7/27/2011	9:42:03 AM	Bypass valve opened
7/27/2011	9:42:03 AM	Helium MFC set to  0.000000
7/27/2011	9:42:03 AM	H2 MFC set to  0.000000
7/27/2011	9:42:03 AM	BCl3 MFC set to  0.000000
7/27/2011	9:42:03 AM	PHl3 MFC set to  0.000000
7/27/2011	9:42:03 AM	SiCl4 MFC set to  0.000000
7/27/2011	9:42:03 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	9:42:04 AM	Tube furnace set to 0
7/27/2011	9:43:08 AM	Helium valve closed
7/27/2011	9:43:08 AM	H2 valve closed
7/27/2011	9:43:08 AM	BCl3 valve closed
7/27/2011	9:43:08 AM	PH3 valve closed
7/27/2011	9:43:08 AM	SiCl4 pre valve closed
7/27/2011	9:43:08 AM	SiCl4 post valve closed
7/27/2011	9:43:08 AM	Main Vac valve closed
7/27/2011	9:43:08 AM	Bubbler valve closed
7/27/2011	9:43:08 AM	Bypass valve opened
7/27/2011	9:43:08 AM	Helium MFC set to  0.000000
7/27/2011	9:43:08 AM	H2 MFC set to  0.000000
7/27/2011	9:43:08 AM	BCl3 MFC set to  0.000000
7/27/2011	9:43:08 AM	PHl3 MFC set to  0.000000
7/27/2011	9:43:08 AM	SiCl4 MFC set to  0.000000
7/27/2011	9:43:08 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	9:43:08 AM	Tube furnace set to 0
7/27/2011	9:44:08 AM	Helium valve closed
7/27/2011	9:44:08 AM	H2 valve closed
7/27/2011	9:44:08 AM	BCl3 valve closed
7/27/2011	9:44:08 AM	PH3 valve closed
7/27/2011	9:44:08 AM	SiCl4 pre valve closed
7/27/2011	9:44:08 AM	SiCl4 post valve closed
7/27/2011	9:44:08 AM	Bypass valve closed
7/27/2011	9:44:08 AM	Bubbler valve closed
7/27/2011	9:44:08 AM	Main Vac valve opened
7/27/2011	9:44:08 AM	Helium MFC set to  0.000000
7/27/2011	9:44:08 AM	H2 MFC set to  0.000000
7/27/2011	9:44:08 AM	BCl3 MFC set to  0.000000
7/27/2011	9:44:08 AM	PHl3 MFC set to  0.000000
7/27/2011	9:44:08 AM	SiCl4 MFC set to  0.000000
7/27/2011	9:44:08 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	9:44:08 AM	Tube furnace set to 0
7/27/2011	9:44:09 AM	Run finished at 9:44 AM
7/27/2011	9:44:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	9:51:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2011	9:51:18 AM	Recipe started at 9:51 AM
7/27/2011	9:51:18 AM	Helium valve closed
7/27/2011	9:51:18 AM	H2 valve closed
7/27/2011	9:51:18 AM	BCl3 valve closed
7/27/2011	9:51:18 AM	PH3 valve closed
7/27/2011	9:51:18 AM	SiCl4 pre valve closed
7/27/2011	9:51:18 AM	SiCl4 post valve closed
7/27/2011	9:51:18 AM	Main Vac valve closed
7/27/2011	9:51:18 AM	Bypass valve closed
7/27/2011	9:51:18 AM	Bubbler valve closed
7/27/2011	9:51:18 AM	Helium MFC set to  0.000000
7/27/2011	9:51:18 AM	H2 MFC set to  0.000000
7/27/2011	9:51:18 AM	BCl3 MFC set to  0.000000
7/27/2011	9:51:18 AM	PHl3 MFC set to  0.000000
7/27/2011	9:51:18 AM	SiCl4 MFC set to  0.000000
7/27/2011	9:51:18 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	9:51:18 AM	Tube furnace set to 0
7/27/2011	9:51:21 AM	H2 valve closed
7/27/2011	9:51:21 AM	BCl3 valve closed
7/27/2011	9:51:21 AM	PH3 valve closed
7/27/2011	9:51:21 AM	SiCl4 pre valve closed
7/27/2011	9:51:21 AM	SiCl4 post valve closed
7/27/2011	9:51:21 AM	Main Vac valve closed
7/27/2011	9:51:21 AM	Bypass valve closed
7/27/2011	9:51:21 AM	Bubbler valve closed
7/27/2011	9:51:21 AM	Helium valve opened
7/27/2011	9:51:21 AM	Helium MFC set to  500.000000
7/27/2011	9:51:21 AM	H2 MFC set to  0.000000
7/27/2011	9:51:21 AM	BCl3 MFC set to  0.000000
7/27/2011	9:51:21 AM	PHl3 MFC set to  0.000000
7/27/2011	9:51:21 AM	SiCl4 MFC set to  0.000000
7/27/2011	9:51:21 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	9:51:21 AM	Tube furnace set to 0
7/27/2011	9:52:27 AM	Helium valve closed
7/27/2011	9:52:27 AM	H2 valve closed
7/27/2011	9:52:27 AM	BCl3 valve closed
7/27/2011	9:52:27 AM	PH3 valve closed
7/27/2011	9:52:27 AM	SiCl4 pre valve closed
7/27/2011	9:52:27 AM	SiCl4 post valve closed
7/27/2011	9:52:27 AM	Main Vac valve closed
7/27/2011	9:52:27 AM	Bypass valve closed
7/27/2011	9:52:27 AM	Bubbler valve closed
7/27/2011	9:52:27 AM	Helium MFC set to  0.000000
7/27/2011	9:52:27 AM	H2 MFC set to  0.000000
7/27/2011	9:52:27 AM	BCl3 MFC set to  0.000000
7/27/2011	9:52:27 AM	PHl3 MFC set to  0.000000
7/27/2011	9:52:27 AM	SiCl4 MFC set to  0.000000
7/27/2011	9:52:27 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	9:52:27 AM	Tube furnace set to 0
7/27/2011	9:52:28 AM	Run finished at 9:52 AM
7/27/2011	9:52:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2011	9:56:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	9:56:31 AM	Recipe started at 9:56 AM
7/27/2011	9:56:31 AM	Helium valve closed
7/27/2011	9:56:31 AM	H2 valve closed
7/27/2011	9:56:31 AM	BCl3 valve closed
7/27/2011	9:56:31 AM	PH3 valve closed
7/27/2011	9:56:31 AM	SiCl4 pre valve closed
7/27/2011	9:56:31 AM	SiCl4 post valve closed
7/27/2011	9:56:31 AM	Main Vac valve closed
7/27/2011	9:56:31 AM	Bubbler valve closed
7/27/2011	9:56:31 AM	Bypass valve opened
7/27/2011	9:56:31 AM	Helium MFC set to  0.000000
7/27/2011	9:56:31 AM	H2 MFC set to  0.000000
7/27/2011	9:56:31 AM	BCl3 MFC set to  0.000000
7/27/2011	9:56:31 AM	PHl3 MFC set to  0.000000
7/27/2011	9:56:31 AM	SiCl4 MFC set to  0.000000
7/27/2011	9:56:31 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	9:56:31 AM	Tube furnace set to 0
7/27/2011	9:57:35 AM	Helium valve closed
7/27/2011	9:57:35 AM	H2 valve closed
7/27/2011	9:57:35 AM	BCl3 valve closed
7/27/2011	9:57:35 AM	PH3 valve closed
7/27/2011	9:57:35 AM	SiCl4 pre valve closed
7/27/2011	9:57:35 AM	SiCl4 post valve closed
7/27/2011	9:57:35 AM	Main Vac valve closed
7/27/2011	9:57:35 AM	Bubbler valve closed
7/27/2011	9:57:35 AM	Bypass valve opened
7/27/2011	9:57:35 AM	Helium MFC set to  0.000000
7/27/2011	9:57:35 AM	H2 MFC set to  0.000000
7/27/2011	9:57:35 AM	BCl3 MFC set to  0.000000
7/27/2011	9:57:35 AM	PHl3 MFC set to  0.000000
7/27/2011	9:57:35 AM	SiCl4 MFC set to  0.000000
7/27/2011	9:57:35 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	9:57:35 AM	Tube furnace set to 0
7/27/2011	9:58:35 AM	Helium valve closed
7/27/2011	9:58:35 AM	H2 valve closed
7/27/2011	9:58:35 AM	BCl3 valve closed
7/27/2011	9:58:35 AM	PH3 valve closed
7/27/2011	9:58:35 AM	SiCl4 pre valve closed
7/27/2011	9:58:35 AM	SiCl4 post valve closed
7/27/2011	9:58:35 AM	Bypass valve closed
7/27/2011	9:58:35 AM	Bubbler valve closed
7/27/2011	9:58:35 AM	Main Vac valve opened
7/27/2011	9:58:35 AM	Helium MFC set to  0.000000
7/27/2011	9:58:35 AM	H2 MFC set to  0.000000
7/27/2011	9:58:35 AM	BCl3 MFC set to  0.000000
7/27/2011	9:58:35 AM	PHl3 MFC set to  0.000000
7/27/2011	9:58:35 AM	SiCl4 MFC set to  0.000000
7/27/2011	9:58:35 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	9:58:35 AM	Tube furnace set to 0
7/27/2011	9:58:36 AM	Run finished at 9:58 AM
7/27/2011	9:58:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	10:15:35 AM	Program started after a nonstandard shutdown
7/27/2011	10:15:37 AM	Helium valve closed
7/27/2011	10:15:37 AM	H2 valve closed
7/27/2011	10:15:37 AM	BCl3 valve closed
7/27/2011	10:15:37 AM	PH3 valve closed
7/27/2011	10:15:37 AM	SiCl4 pre valve closed
7/27/2011	10:15:37 AM	SiCl4 post valve closed
7/27/2011	10:15:37 AM	Main Vac valve closed
7/27/2011	10:15:37 AM	Bypass valve closed
7/27/2011	10:15:37 AM	Bubbler valve closed
7/27/2011	10:15:37 AM	Helium MFC set to  0.000000
7/27/2011	10:15:37 AM	H2 MFC set to  0.000000
7/27/2011	10:15:37 AM	BCl3 MFC set to  0.000000
7/27/2011	10:15:37 AM	PHl3 MFC set to  0.000000
7/27/2011	10:15:37 AM	SiCl4 MFC set to  0.000000
7/27/2011	10:15:37 AM	Bypass solenoid MFC set to  760.000000
7/27/2011	10:15:37 AM	Tube furnace set to 0
7/27/2011	10:15:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	10:15:53 AM	Recipe started at 10:15 AM
7/27/2011	10:15:53 AM	Helium valve closed
7/27/2011	10:15:53 AM	H2 valve closed
7/27/2011	10:15:53 AM	BCl3 valve closed
7/27/2011	10:15:53 AM	PH3 valve closed
7/27/2011	10:15:53 AM	SiCl4 pre valve closed
7/27/2011	10:15:53 AM	SiCl4 post valve closed
7/27/2011	10:15:53 AM	Main Vac valve closed
7/27/2011	10:15:53 AM	Bubbler valve closed
7/27/2011	10:15:53 AM	Bypass valve opened
7/27/2011	10:15:53 AM	Helium MFC set to  0.000000
7/27/2011	10:15:53 AM	H2 MFC set to  0.000000
7/27/2011	10:15:53 AM	BCl3 MFC set to  0.000000
7/27/2011	10:15:53 AM	PHl3 MFC set to  0.000000
7/27/2011	10:15:53 AM	SiCl4 MFC set to  0.000000
7/27/2011	10:15:53 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	10:15:54 AM	Tube furnace set to 0
7/27/2011	10:15:54 AM	Helium valve closed
7/27/2011	10:15:54 AM	H2 valve closed
7/27/2011	10:15:54 AM	BCl3 valve closed
7/27/2011	10:15:54 AM	PH3 valve closed
7/27/2011	10:15:54 AM	SiCl4 pre valve closed
7/27/2011	10:15:54 AM	SiCl4 post valve closed
7/27/2011	10:15:54 AM	Main Vac valve closed
7/27/2011	10:15:54 AM	Bubbler valve closed
7/27/2011	10:15:54 AM	Bypass valve opened
7/27/2011	10:15:54 AM	Helium MFC set to  0.000000
7/27/2011	10:15:54 AM	H2 MFC set to  0.000000
7/27/2011	10:15:54 AM	BCl3 MFC set to  0.000000
7/27/2011	10:15:54 AM	PHl3 MFC set to  0.000000
7/27/2011	10:15:54 AM	SiCl4 MFC set to  0.000000
7/27/2011	10:15:54 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	10:15:54 AM	Tube furnace set to 0
7/27/2011	10:16:54 AM	Helium valve closed
7/27/2011	10:16:54 AM	H2 valve closed
7/27/2011	10:16:54 AM	BCl3 valve closed
7/27/2011	10:16:54 AM	PH3 valve closed
7/27/2011	10:16:54 AM	SiCl4 pre valve closed
7/27/2011	10:16:54 AM	SiCl4 post valve closed
7/27/2011	10:16:54 AM	Bypass valve closed
7/27/2011	10:16:54 AM	Bubbler valve closed
7/27/2011	10:16:54 AM	Main Vac valve opened
7/27/2011	10:16:54 AM	Helium MFC set to  0.000000
7/27/2011	10:16:54 AM	H2 MFC set to  0.000000
7/27/2011	10:16:54 AM	BCl3 MFC set to  0.000000
7/27/2011	10:16:54 AM	PHl3 MFC set to  0.000000
7/27/2011	10:16:54 AM	SiCl4 MFC set to  0.000000
7/27/2011	10:16:54 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	10:16:54 AM	Tube furnace set to 0
7/27/2011	10:16:55 AM	Run finished at 10:16 AM
7/27/2011	10:16:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	10:25:50 AM	Main Vac valve closed
7/27/2011	10:26:02 AM	Main Vac valve opened
7/27/2011	10:26:57 AM	Recipe started at 10:26 AM
7/27/2011	10:26:57 AM	Helium valve closed
7/27/2011	10:26:57 AM	H2 valve closed
7/27/2011	10:26:57 AM	BCl3 valve closed
7/27/2011	10:26:57 AM	PH3 valve closed
7/27/2011	10:26:57 AM	SiCl4 pre valve closed
7/27/2011	10:26:57 AM	SiCl4 post valve closed
7/27/2011	10:26:57 AM	Main Vac valve closed
7/27/2011	10:26:57 AM	Bypass valve closed
7/27/2011	10:26:57 AM	Bubbler valve closed
7/27/2011	10:26:57 AM	Helium MFC set to  0.000000
7/27/2011	10:26:57 AM	H2 MFC set to  0.000000
7/27/2011	10:26:57 AM	BCl3 MFC set to  0.000000
7/27/2011	10:26:57 AM	PHl3 MFC set to  0.000000
7/27/2011	10:26:57 AM	SiCl4 MFC set to  0.000000
7/27/2011	10:26:57 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	10:26:57 AM	Tube furnace set to 0
7/27/2011	10:27:00 AM	Helium valve closed
7/27/2011	10:27:00 AM	BCl3 valve closed
7/27/2011	10:27:00 AM	PH3 valve closed
7/27/2011	10:27:00 AM	SiCl4 pre valve closed
7/27/2011	10:27:00 AM	SiCl4 post valve closed
7/27/2011	10:27:00 AM	Main Vac valve closed
7/27/2011	10:27:00 AM	Bypass valve closed
7/27/2011	10:27:00 AM	Bubbler valve closed
7/27/2011	10:27:00 AM	H2 valve opened
7/27/2011	10:27:00 AM	Helium MFC set to  0.000000
7/27/2011	10:27:00 AM	H2 MFC set to  500.000000
7/27/2011	10:27:00 AM	BCl3 MFC set to  0.000000
7/27/2011	10:27:00 AM	PHl3 MFC set to  0.000000
7/27/2011	10:27:00 AM	SiCl4 MFC set to  0.000000
7/27/2011	10:27:00 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	10:27:00 AM	Tube furnace set to 0
7/27/2011	10:28:08 AM	Helium valve closed
7/27/2011	10:28:08 AM	BCl3 valve closed
7/27/2011	10:28:08 AM	PH3 valve closed
7/27/2011	10:28:08 AM	SiCl4 pre valve closed
7/27/2011	10:28:08 AM	SiCl4 post valve closed
7/27/2011	10:28:08 AM	Main Vac valve closed
7/27/2011	10:28:08 AM	Bypass valve closed
7/27/2011	10:28:08 AM	H2 valve opened
7/27/2011	10:28:08 AM	Bubbler valve opened
7/27/2011	10:28:08 AM	Helium MFC set to  0.000000
7/27/2011	10:28:08 AM	H2 MFC set to  500.000000
7/27/2011	10:28:08 AM	BCl3 MFC set to  0.000000
7/27/2011	10:28:08 AM	PHl3 MFC set to  0.000000
7/27/2011	10:28:08 AM	SiCl4 MFC set to  0.000000
7/27/2011	10:28:08 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	10:28:08 AM	Tube furnace set to 0
7/27/2011	10:28:09 AM	Helium valve closed
7/27/2011	10:28:09 AM	BCl3 valve closed
7/27/2011	10:28:09 AM	PH3 valve closed
7/27/2011	10:28:09 AM	SiCl4 pre valve closed
7/27/2011	10:28:09 AM	SiCl4 post valve closed
7/27/2011	10:28:09 AM	Main Vac valve closed
7/27/2011	10:28:09 AM	Bypass valve closed
7/27/2011	10:28:09 AM	H2 valve opened
7/27/2011	10:28:09 AM	Bubbler valve opened
7/27/2011	10:28:09 AM	Helium MFC set to  0.000000
7/27/2011	10:28:09 AM	H2 MFC set to  500.000000
7/27/2011	10:28:09 AM	BCl3 MFC set to  0.000000
7/27/2011	10:28:09 AM	PHl3 MFC set to  0.000000
7/27/2011	10:28:09 AM	SiCl4 MFC set to  0.000000
7/27/2011	10:28:09 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	10:28:09 AM	Tube furnace set to 1000
7/27/2011	10:48:09 AM	Helium valve closed
7/27/2011	10:48:09 AM	BCl3 valve closed
7/27/2011	10:48:09 AM	PH3 valve closed
7/27/2011	10:48:09 AM	SiCl4 pre valve closed
7/27/2011	10:48:09 AM	SiCl4 post valve closed
7/27/2011	10:48:09 AM	Main Vac valve closed
7/27/2011	10:48:09 AM	Bypass valve closed
7/27/2011	10:48:09 AM	H2 valve opened
7/27/2011	10:48:09 AM	Bubbler valve opened
7/27/2011	10:48:09 AM	Helium MFC set to  0.000000
7/27/2011	10:48:09 AM	H2 MFC set to  500.000000
7/27/2011	10:48:09 AM	BCl3 MFC set to  0.000000
7/27/2011	10:48:09 AM	PHl3 MFC set to  0.000000
7/27/2011	10:48:09 AM	SiCl4 MFC set to  0.000000
7/27/2011	10:48:09 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	10:48:09 AM	Tube furnace set to 1000
7/27/2011	11:08:09 AM	H2 valve closed
7/27/2011	11:08:09 AM	BCl3 valve closed
7/27/2011	11:08:09 AM	PH3 valve closed
7/27/2011	11:08:09 AM	SiCl4 pre valve closed
7/27/2011	11:08:09 AM	SiCl4 post valve closed
7/27/2011	11:08:09 AM	Main Vac valve closed
7/27/2011	11:08:09 AM	Bypass valve closed
7/27/2011	11:08:09 AM	Helium valve opened
7/27/2011	11:08:09 AM	Bubbler valve opened
7/27/2011	11:08:09 AM	Helium MFC set to  500.000000
7/27/2011	11:08:09 AM	H2 MFC set to  0.000000
7/27/2011	11:08:09 AM	BCl3 MFC set to  0.000000
7/27/2011	11:08:09 AM	PHl3 MFC set to  0.000000
7/27/2011	11:08:09 AM	SiCl4 MFC set to  0.000000
7/27/2011	11:08:09 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	11:08:09 AM	Tube furnace set to 0
7/27/2011	11:28:09 AM	Helium valve closed
7/27/2011	11:28:09 AM	H2 valve closed
7/27/2011	11:28:09 AM	BCl3 valve closed
7/27/2011	11:28:09 AM	PH3 valve closed
7/27/2011	11:28:09 AM	SiCl4 pre valve closed
7/27/2011	11:28:09 AM	SiCl4 post valve closed
7/27/2011	11:28:09 AM	Main Vac valve closed
7/27/2011	11:28:09 AM	Bypass valve closed
7/27/2011	11:28:09 AM	Bubbler valve closed
7/27/2011	11:28:09 AM	Helium MFC set to  0.000000
7/27/2011	11:28:09 AM	H2 MFC set to  0.000000
7/27/2011	11:28:09 AM	BCl3 MFC set to  0.000000
7/27/2011	11:28:09 AM	PHl3 MFC set to  0.000000
7/27/2011	11:28:09 AM	SiCl4 MFC set to  0.000000
7/27/2011	11:28:09 AM	Bypass solenoid MFC set to  0.000000
7/27/2011	11:28:10 AM	Tube furnace set to 0
7/27/2011	12:28:09 PM	Run finished at 12:28 PM
7/27/2011	2:00:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2011	2:00:53 PM	Recipe started at 2:00 PM
7/27/2011	2:00:53 PM	Helium valve closed
7/27/2011	2:00:53 PM	H2 valve closed
7/27/2011	2:00:53 PM	BCl3 valve closed
7/27/2011	2:00:53 PM	PH3 valve closed
7/27/2011	2:00:53 PM	SiCl4 pre valve closed
7/27/2011	2:00:53 PM	SiCl4 post valve closed
7/27/2011	2:00:53 PM	Main Vac valve closed
7/27/2011	2:00:53 PM	Bypass valve closed
7/27/2011	2:00:53 PM	Bubbler valve closed
7/27/2011	2:00:53 PM	Helium MFC set to  0.000000
7/27/2011	2:00:53 PM	H2 MFC set to  0.000000
7/27/2011	2:00:53 PM	BCl3 MFC set to  0.000000
7/27/2011	2:00:53 PM	PHl3 MFC set to  0.000000
7/27/2011	2:00:53 PM	SiCl4 MFC set to  0.000000
7/27/2011	2:00:53 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:00:53 PM	Tube furnace set to 0
7/27/2011	2:00:56 PM	H2 valve closed
7/27/2011	2:00:56 PM	BCl3 valve closed
7/27/2011	2:00:56 PM	PH3 valve closed
7/27/2011	2:00:56 PM	SiCl4 pre valve closed
7/27/2011	2:00:56 PM	SiCl4 post valve closed
7/27/2011	2:00:56 PM	Main Vac valve closed
7/27/2011	2:00:56 PM	Bypass valve closed
7/27/2011	2:00:56 PM	Bubbler valve closed
7/27/2011	2:00:56 PM	Helium valve opened
7/27/2011	2:00:56 PM	Helium MFC set to  500.000000
7/27/2011	2:00:56 PM	H2 MFC set to  0.000000
7/27/2011	2:00:56 PM	BCl3 MFC set to  0.000000
7/27/2011	2:00:56 PM	PHl3 MFC set to  0.000000
7/27/2011	2:00:56 PM	SiCl4 MFC set to  0.000000
7/27/2011	2:00:56 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:00:56 PM	Tube furnace set to 0
7/27/2011	2:01:06 PM	Helium valve closed
7/27/2011	2:01:06 PM	H2 valve closed
7/27/2011	2:01:06 PM	BCl3 valve closed
7/27/2011	2:01:06 PM	PH3 valve closed
7/27/2011	2:01:06 PM	SiCl4 pre valve closed
7/27/2011	2:01:06 PM	SiCl4 post valve closed
7/27/2011	2:01:06 PM	Main Vac valve closed
7/27/2011	2:01:06 PM	Bypass valve closed
7/27/2011	2:01:06 PM	Bubbler valve closed
7/27/2011	2:01:06 PM	Helium MFC set to  0.000000
7/27/2011	2:01:06 PM	H2 MFC set to  0.000000
7/27/2011	2:01:06 PM	BCl3 MFC set to  0.000000
7/27/2011	2:01:06 PM	PHl3 MFC set to  0.000000
7/27/2011	2:01:06 PM	SiCl4 MFC set to  0.000000
7/27/2011	2:01:06 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:01:06 PM	Tube furnace set to 0
7/27/2011	2:01:07 PM	Run finished at 2:01 PM
7/27/2011	2:01:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2011	2:04:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	2:04:19 PM	Recipe started at 2:04 PM
7/27/2011	2:04:19 PM	Helium valve closed
7/27/2011	2:04:19 PM	H2 valve closed
7/27/2011	2:04:19 PM	BCl3 valve closed
7/27/2011	2:04:19 PM	PH3 valve closed
7/27/2011	2:04:19 PM	SiCl4 pre valve closed
7/27/2011	2:04:19 PM	SiCl4 post valve closed
7/27/2011	2:04:19 PM	Main Vac valve closed
7/27/2011	2:04:19 PM	Bubbler valve closed
7/27/2011	2:04:19 PM	Bypass valve opened
7/27/2011	2:04:19 PM	Helium MFC set to  0.000000
7/27/2011	2:04:19 PM	H2 MFC set to  0.000000
7/27/2011	2:04:19 PM	BCl3 MFC set to  0.000000
7/27/2011	2:04:19 PM	PHl3 MFC set to  0.000000
7/27/2011	2:04:19 PM	SiCl4 MFC set to  0.000000
7/27/2011	2:04:19 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:04:19 PM	Tube furnace set to 0
7/27/2011	2:05:22 PM	Helium valve closed
7/27/2011	2:05:22 PM	H2 valve closed
7/27/2011	2:05:22 PM	BCl3 valve closed
7/27/2011	2:05:22 PM	PH3 valve closed
7/27/2011	2:05:22 PM	SiCl4 pre valve closed
7/27/2011	2:05:22 PM	SiCl4 post valve closed
7/27/2011	2:05:22 PM	Main Vac valve closed
7/27/2011	2:05:23 PM	Bubbler valve closed
7/27/2011	2:05:23 PM	Bypass valve opened
7/27/2011	2:05:23 PM	Helium MFC set to  0.000000
7/27/2011	2:05:23 PM	H2 MFC set to  0.000000
7/27/2011	2:05:23 PM	BCl3 MFC set to  0.000000
7/27/2011	2:05:23 PM	PHl3 MFC set to  0.000000
7/27/2011	2:05:23 PM	SiCl4 MFC set to  0.000000
7/27/2011	2:05:23 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:05:23 PM	Tube furnace set to 0
7/27/2011	2:06:23 PM	Helium valve closed
7/27/2011	2:06:23 PM	H2 valve closed
7/27/2011	2:06:23 PM	BCl3 valve closed
7/27/2011	2:06:23 PM	PH3 valve closed
7/27/2011	2:06:23 PM	SiCl4 pre valve closed
7/27/2011	2:06:23 PM	SiCl4 post valve closed
7/27/2011	2:06:23 PM	Bypass valve closed
7/27/2011	2:06:23 PM	Bubbler valve closed
7/27/2011	2:06:23 PM	Main Vac valve opened
7/27/2011	2:06:23 PM	Helium MFC set to  0.000000
7/27/2011	2:06:23 PM	H2 MFC set to  0.000000
7/27/2011	2:06:23 PM	BCl3 MFC set to  0.000000
7/27/2011	2:06:23 PM	PHl3 MFC set to  0.000000
7/27/2011	2:06:23 PM	SiCl4 MFC set to  0.000000
7/27/2011	2:06:23 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:06:23 PM	Tube furnace set to 0
7/27/2011	2:06:24 PM	Run finished at 2:06 PM
7/27/2011	2:06:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	2:32:24 PM	Main Vac valve closed
7/27/2011	2:32:33 PM	Main Vac valve opened
7/27/2011	2:33:34 PM	Recipe started at 2:33 PM
7/27/2011	2:33:34 PM	Helium valve closed
7/27/2011	2:33:34 PM	H2 valve closed
7/27/2011	2:33:34 PM	BCl3 valve closed
7/27/2011	2:33:34 PM	PH3 valve closed
7/27/2011	2:33:34 PM	SiCl4 pre valve closed
7/27/2011	2:33:34 PM	SiCl4 post valve closed
7/27/2011	2:33:34 PM	Main Vac valve closed
7/27/2011	2:33:34 PM	Bypass valve closed
7/27/2011	2:33:34 PM	Bubbler valve closed
7/27/2011	2:33:34 PM	Helium MFC set to  0.000000
7/27/2011	2:33:34 PM	H2 MFC set to  0.000000
7/27/2011	2:33:34 PM	BCl3 MFC set to  0.000000
7/27/2011	2:33:34 PM	PHl3 MFC set to  0.000000
7/27/2011	2:33:34 PM	SiCl4 MFC set to  0.000000
7/27/2011	2:33:34 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:33:34 PM	Tube furnace set to 0
7/27/2011	2:33:37 PM	Helium valve closed
7/27/2011	2:33:37 PM	BCl3 valve closed
7/27/2011	2:33:37 PM	PH3 valve closed
7/27/2011	2:33:37 PM	SiCl4 pre valve closed
7/27/2011	2:33:37 PM	SiCl4 post valve closed
7/27/2011	2:33:37 PM	Main Vac valve closed
7/27/2011	2:33:37 PM	Bypass valve closed
7/27/2011	2:33:37 PM	Bubbler valve closed
7/27/2011	2:33:37 PM	H2 valve opened
7/27/2011	2:33:37 PM	Helium MFC set to  0.000000
7/27/2011	2:33:37 PM	H2 MFC set to  500.000000
7/27/2011	2:33:37 PM	BCl3 MFC set to  0.000000
7/27/2011	2:33:37 PM	PHl3 MFC set to  0.000000
7/27/2011	2:33:37 PM	SiCl4 MFC set to  0.000000
7/27/2011	2:33:37 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:33:37 PM	Tube furnace set to 0
7/27/2011	2:34:45 PM	Helium valve closed
7/27/2011	2:34:45 PM	BCl3 valve closed
7/27/2011	2:34:45 PM	PH3 valve closed
7/27/2011	2:34:45 PM	SiCl4 pre valve closed
7/27/2011	2:34:45 PM	SiCl4 post valve closed
7/27/2011	2:34:45 PM	Main Vac valve closed
7/27/2011	2:34:45 PM	Bypass valve closed
7/27/2011	2:34:45 PM	H2 valve opened
7/27/2011	2:34:45 PM	Bubbler valve opened
7/27/2011	2:34:45 PM	Helium MFC set to  0.000000
7/27/2011	2:34:45 PM	H2 MFC set to  500.000000
7/27/2011	2:34:45 PM	BCl3 MFC set to  0.000000
7/27/2011	2:34:45 PM	PHl3 MFC set to  0.000000
7/27/2011	2:34:45 PM	SiCl4 MFC set to  0.000000
7/27/2011	2:34:45 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:34:45 PM	Tube furnace set to 0
7/27/2011	2:34:46 PM	Helium valve closed
7/27/2011	2:34:46 PM	BCl3 valve closed
7/27/2011	2:34:46 PM	PH3 valve closed
7/27/2011	2:34:46 PM	SiCl4 pre valve closed
7/27/2011	2:34:46 PM	SiCl4 post valve closed
7/27/2011	2:34:46 PM	Main Vac valve closed
7/27/2011	2:34:46 PM	Bypass valve closed
7/27/2011	2:34:46 PM	H2 valve opened
7/27/2011	2:34:46 PM	Bubbler valve opened
7/27/2011	2:34:46 PM	Helium MFC set to  0.000000
7/27/2011	2:34:46 PM	H2 MFC set to  500.000000
7/27/2011	2:34:46 PM	BCl3 MFC set to  0.000000
7/27/2011	2:34:46 PM	PHl3 MFC set to  0.000000
7/27/2011	2:34:46 PM	SiCl4 MFC set to  0.000000
7/27/2011	2:34:46 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:34:46 PM	Tube furnace set to 1000
7/27/2011	2:54:46 PM	Helium valve closed
7/27/2011	2:54:46 PM	BCl3 valve closed
7/27/2011	2:54:46 PM	PH3 valve closed
7/27/2011	2:54:46 PM	SiCl4 pre valve closed
7/27/2011	2:54:46 PM	SiCl4 post valve closed
7/27/2011	2:54:46 PM	Main Vac valve closed
7/27/2011	2:54:46 PM	Bypass valve closed
7/27/2011	2:54:46 PM	H2 valve opened
7/27/2011	2:54:46 PM	Bubbler valve opened
7/27/2011	2:54:46 PM	Helium MFC set to  0.000000
7/27/2011	2:54:46 PM	H2 MFC set to  500.000000
7/27/2011	2:54:46 PM	BCl3 MFC set to  0.000000
7/27/2011	2:54:46 PM	PHl3 MFC set to  0.000000
7/27/2011	2:54:46 PM	SiCl4 MFC set to  0.000000
7/27/2011	2:54:46 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	2:54:46 PM	Tube furnace set to 1000
7/27/2011	3:14:46 PM	H2 valve closed
7/27/2011	3:14:46 PM	BCl3 valve closed
7/27/2011	3:14:46 PM	PH3 valve closed
7/27/2011	3:14:46 PM	SiCl4 pre valve closed
7/27/2011	3:14:46 PM	SiCl4 post valve closed
7/27/2011	3:14:46 PM	Main Vac valve closed
7/27/2011	3:14:46 PM	Bypass valve closed
7/27/2011	3:14:46 PM	Helium valve opened
7/27/2011	3:14:46 PM	Bubbler valve opened
7/27/2011	3:14:46 PM	Helium MFC set to  500.000000
7/27/2011	3:14:46 PM	H2 MFC set to  0.000000
7/27/2011	3:14:46 PM	BCl3 MFC set to  0.000000
7/27/2011	3:14:46 PM	PHl3 MFC set to  0.000000
7/27/2011	3:14:46 PM	SiCl4 MFC set to  0.000000
7/27/2011	3:14:46 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	3:14:46 PM	Tube furnace set to 0
7/27/2011	3:34:46 PM	Helium valve closed
7/27/2011	3:34:46 PM	H2 valve closed
7/27/2011	3:34:46 PM	BCl3 valve closed
7/27/2011	3:34:46 PM	PH3 valve closed
7/27/2011	3:34:46 PM	SiCl4 pre valve closed
7/27/2011	3:34:46 PM	SiCl4 post valve closed
7/27/2011	3:34:46 PM	Main Vac valve closed
7/27/2011	3:34:46 PM	Bypass valve closed
7/27/2011	3:34:46 PM	Bubbler valve closed
7/27/2011	3:34:46 PM	Helium MFC set to  0.000000
7/27/2011	3:34:46 PM	H2 MFC set to  0.000000
7/27/2011	3:34:46 PM	BCl3 MFC set to  0.000000
7/27/2011	3:34:46 PM	PHl3 MFC set to  0.000000
7/27/2011	3:34:46 PM	SiCl4 MFC set to  0.000000
7/27/2011	3:34:46 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	3:34:47 PM	Tube furnace set to 0
7/27/2011	4:34:47 PM	Run finished at 4:34 PM
7/27/2011	4:48:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2011	4:48:58 PM	Recipe started at 4:48 PM
7/27/2011	4:48:58 PM	Helium valve closed
7/27/2011	4:48:58 PM	H2 valve closed
7/27/2011	4:48:58 PM	BCl3 valve closed
7/27/2011	4:48:58 PM	PH3 valve closed
7/27/2011	4:48:58 PM	SiCl4 pre valve closed
7/27/2011	4:48:58 PM	SiCl4 post valve closed
7/27/2011	4:48:58 PM	Main Vac valve closed
7/27/2011	4:48:58 PM	Bypass valve closed
7/27/2011	4:48:58 PM	Bubbler valve closed
7/27/2011	4:48:58 PM	Helium MFC set to  0.000000
7/27/2011	4:48:58 PM	H2 MFC set to  0.000000
7/27/2011	4:48:58 PM	BCl3 MFC set to  0.000000
7/27/2011	4:48:58 PM	PHl3 MFC set to  0.000000
7/27/2011	4:48:58 PM	SiCl4 MFC set to  0.000000
7/27/2011	4:48:58 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	4:48:58 PM	Tube furnace set to 0
7/27/2011	4:49:01 PM	H2 valve closed
7/27/2011	4:49:01 PM	BCl3 valve closed
7/27/2011	4:49:01 PM	PH3 valve closed
7/27/2011	4:49:01 PM	SiCl4 pre valve closed
7/27/2011	4:49:01 PM	SiCl4 post valve closed
7/27/2011	4:49:01 PM	Main Vac valve closed
7/27/2011	4:49:01 PM	Bypass valve closed
7/27/2011	4:49:01 PM	Bubbler valve closed
7/27/2011	4:49:01 PM	Helium valve opened
7/27/2011	4:49:01 PM	Helium MFC set to  500.000000
7/27/2011	4:49:01 PM	H2 MFC set to  0.000000
7/27/2011	4:49:01 PM	BCl3 MFC set to  0.000000
7/27/2011	4:49:01 PM	PHl3 MFC set to  0.000000
7/27/2011	4:49:01 PM	SiCl4 MFC set to  0.000000
7/27/2011	4:49:01 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	4:49:01 PM	Tube furnace set to 0
7/27/2011	4:49:02 PM	Helium valve closed
7/27/2011	4:49:02 PM	H2 valve closed
7/27/2011	4:49:02 PM	BCl3 valve closed
7/27/2011	4:49:02 PM	PH3 valve closed
7/27/2011	4:49:02 PM	SiCl4 pre valve closed
7/27/2011	4:49:02 PM	SiCl4 post valve closed
7/27/2011	4:49:02 PM	Main Vac valve closed
7/27/2011	4:49:02 PM	Bypass valve closed
7/27/2011	4:49:02 PM	Bubbler valve closed
7/27/2011	4:49:02 PM	Helium MFC set to  0.000000
7/27/2011	4:49:02 PM	H2 MFC set to  0.000000
7/27/2011	4:49:02 PM	BCl3 MFC set to  0.000000
7/27/2011	4:49:02 PM	PHl3 MFC set to  0.000000
7/27/2011	4:49:02 PM	SiCl4 MFC set to  0.000000
7/27/2011	4:49:02 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	4:49:03 PM	Tube furnace set to 0
7/27/2011	4:49:04 PM	Run finished at 4:49 PM
7/27/2011	4:49:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2011	4:53:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	4:53:02 PM	Recipe started at 4:53 PM
7/27/2011	4:53:02 PM	Helium valve closed
7/27/2011	4:53:02 PM	H2 valve closed
7/27/2011	4:53:02 PM	BCl3 valve closed
7/27/2011	4:53:02 PM	PH3 valve closed
7/27/2011	4:53:02 PM	SiCl4 pre valve closed
7/27/2011	4:53:02 PM	SiCl4 post valve closed
7/27/2011	4:53:02 PM	Main Vac valve closed
7/27/2011	4:53:02 PM	Bubbler valve closed
7/27/2011	4:53:02 PM	Bypass valve opened
7/27/2011	4:53:02 PM	Helium MFC set to  0.000000
7/27/2011	4:53:02 PM	H2 MFC set to  0.000000
7/27/2011	4:53:02 PM	BCl3 MFC set to  0.000000
7/27/2011	4:53:02 PM	PHl3 MFC set to  0.000000
7/27/2011	4:53:02 PM	SiCl4 MFC set to  0.000000
7/27/2011	4:53:02 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	4:53:03 PM	Tube furnace set to 0
7/27/2011	4:54:06 PM	Helium valve closed
7/27/2011	4:54:06 PM	H2 valve closed
7/27/2011	4:54:06 PM	BCl3 valve closed
7/27/2011	4:54:06 PM	PH3 valve closed
7/27/2011	4:54:06 PM	SiCl4 pre valve closed
7/27/2011	4:54:06 PM	SiCl4 post valve closed
7/27/2011	4:54:06 PM	Main Vac valve closed
7/27/2011	4:54:06 PM	Bubbler valve closed
7/27/2011	4:54:06 PM	Bypass valve opened
7/27/2011	4:54:06 PM	Helium MFC set to  0.000000
7/27/2011	4:54:06 PM	H2 MFC set to  0.000000
7/27/2011	4:54:06 PM	BCl3 MFC set to  0.000000
7/27/2011	4:54:06 PM	PHl3 MFC set to  0.000000
7/27/2011	4:54:06 PM	SiCl4 MFC set to  0.000000
7/27/2011	4:54:06 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	4:54:06 PM	Tube furnace set to 0
7/27/2011	4:55:06 PM	Helium valve closed
7/27/2011	4:55:06 PM	H2 valve closed
7/27/2011	4:55:06 PM	BCl3 valve closed
7/27/2011	4:55:06 PM	PH3 valve closed
7/27/2011	4:55:06 PM	SiCl4 pre valve closed
7/27/2011	4:55:06 PM	SiCl4 post valve closed
7/27/2011	4:55:06 PM	Bypass valve closed
7/27/2011	4:55:06 PM	Bubbler valve closed
7/27/2011	4:55:06 PM	Main Vac valve opened
7/27/2011	4:55:06 PM	Helium MFC set to  0.000000
7/27/2011	4:55:06 PM	H2 MFC set to  0.000000
7/27/2011	4:55:06 PM	BCl3 MFC set to  0.000000
7/27/2011	4:55:06 PM	PHl3 MFC set to  0.000000
7/27/2011	4:55:06 PM	SiCl4 MFC set to  0.000000
7/27/2011	4:55:06 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	4:55:06 PM	Tube furnace set to 0
7/27/2011	4:55:07 PM	Run finished at 4:55 PM
7/27/2011	4:55:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	5:12:07 PM	Main Vac valve closed
7/27/2011	5:12:15 PM	Main Vac valve opened
7/27/2011	5:13:21 PM	Main Vac valve closed
7/27/2011	5:13:32 PM	Main Vac valve opened
7/27/2011	5:14:16 PM	Main Vac valve closed
7/27/2011	5:14:32 PM	Main Vac valve opened
7/27/2011	5:15:53 PM	Recipe started at 5:15 PM
7/27/2011	5:15:53 PM	Helium valve closed
7/27/2011	5:15:53 PM	H2 valve closed
7/27/2011	5:15:53 PM	BCl3 valve closed
7/27/2011	5:15:53 PM	PH3 valve closed
7/27/2011	5:15:53 PM	SiCl4 pre valve closed
7/27/2011	5:15:53 PM	SiCl4 post valve closed
7/27/2011	5:15:53 PM	Main Vac valve closed
7/27/2011	5:15:53 PM	Bypass valve closed
7/27/2011	5:15:53 PM	Bubbler valve closed
7/27/2011	5:15:53 PM	Helium MFC set to  0.000000
7/27/2011	5:15:53 PM	H2 MFC set to  0.000000
7/27/2011	5:15:53 PM	BCl3 MFC set to  0.000000
7/27/2011	5:15:53 PM	PHl3 MFC set to  0.000000
7/27/2011	5:15:53 PM	SiCl4 MFC set to  0.000000
7/27/2011	5:15:53 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	5:15:53 PM	Tube furnace set to 0
7/27/2011	5:15:56 PM	Helium valve closed
7/27/2011	5:15:56 PM	BCl3 valve closed
7/27/2011	5:15:56 PM	PH3 valve closed
7/27/2011	5:15:56 PM	SiCl4 pre valve closed
7/27/2011	5:15:56 PM	SiCl4 post valve closed
7/27/2011	5:15:56 PM	Main Vac valve closed
7/27/2011	5:15:56 PM	Bypass valve closed
7/27/2011	5:15:56 PM	Bubbler valve closed
7/27/2011	5:15:56 PM	H2 valve opened
7/27/2011	5:15:56 PM	Helium MFC set to  0.000000
7/27/2011	5:15:56 PM	H2 MFC set to  500.000000
7/27/2011	5:15:56 PM	BCl3 MFC set to  0.000000
7/27/2011	5:15:56 PM	PHl3 MFC set to  0.000000
7/27/2011	5:15:56 PM	SiCl4 MFC set to  0.000000
7/27/2011	5:15:56 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	5:15:56 PM	Tube furnace set to 0
7/27/2011	5:17:03 PM	Helium valve closed
7/27/2011	5:17:03 PM	BCl3 valve closed
7/27/2011	5:17:03 PM	PH3 valve closed
7/27/2011	5:17:03 PM	SiCl4 pre valve closed
7/27/2011	5:17:03 PM	SiCl4 post valve closed
7/27/2011	5:17:03 PM	Main Vac valve closed
7/27/2011	5:17:03 PM	Bypass valve closed
7/27/2011	5:17:03 PM	H2 valve opened
7/27/2011	5:17:03 PM	Bubbler valve opened
7/27/2011	5:17:03 PM	Helium MFC set to  0.000000
7/27/2011	5:17:03 PM	H2 MFC set to  500.000000
7/27/2011	5:17:03 PM	BCl3 MFC set to  0.000000
7/27/2011	5:17:03 PM	PHl3 MFC set to  0.000000
7/27/2011	5:17:03 PM	SiCl4 MFC set to  0.000000
7/27/2011	5:17:03 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	5:17:04 PM	Tube furnace set to 0
7/27/2011	5:17:05 PM	Helium valve closed
7/27/2011	5:17:05 PM	BCl3 valve closed
7/27/2011	5:17:05 PM	PH3 valve closed
7/27/2011	5:17:05 PM	SiCl4 pre valve closed
7/27/2011	5:17:05 PM	SiCl4 post valve closed
7/27/2011	5:17:05 PM	Main Vac valve closed
7/27/2011	5:17:05 PM	Bypass valve closed
7/27/2011	5:17:05 PM	H2 valve opened
7/27/2011	5:17:05 PM	Bubbler valve opened
7/27/2011	5:17:05 PM	Helium MFC set to  0.000000
7/27/2011	5:17:05 PM	H2 MFC set to  500.000000
7/27/2011	5:17:05 PM	BCl3 MFC set to  0.000000
7/27/2011	5:17:05 PM	PHl3 MFC set to  0.000000
7/27/2011	5:17:05 PM	SiCl4 MFC set to  0.000000
7/27/2011	5:17:05 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	5:17:05 PM	Tube furnace set to 800
7/27/2011	5:37:05 PM	Helium valve closed
7/27/2011	5:37:05 PM	BCl3 valve closed
7/27/2011	5:37:05 PM	PH3 valve closed
7/27/2011	5:37:05 PM	SiCl4 pre valve closed
7/27/2011	5:37:05 PM	SiCl4 post valve closed
7/27/2011	5:37:05 PM	Main Vac valve closed
7/27/2011	5:37:05 PM	Bypass valve closed
7/27/2011	5:37:05 PM	H2 valve opened
7/27/2011	5:37:05 PM	Bubbler valve opened
7/27/2011	5:37:05 PM	Helium MFC set to  0.000000
7/27/2011	5:37:05 PM	H2 MFC set to  500.000000
7/27/2011	5:37:05 PM	BCl3 MFC set to  0.000000
7/27/2011	5:37:05 PM	PHl3 MFC set to  0.000000
7/27/2011	5:37:05 PM	SiCl4 MFC set to  0.000000
7/27/2011	5:37:05 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	5:37:05 PM	Tube furnace set to 800
7/27/2011	5:57:05 PM	H2 valve closed
7/27/2011	5:57:05 PM	BCl3 valve closed
7/27/2011	5:57:05 PM	PH3 valve closed
7/27/2011	5:57:05 PM	SiCl4 pre valve closed
7/27/2011	5:57:05 PM	SiCl4 post valve closed
7/27/2011	5:57:05 PM	Main Vac valve closed
7/27/2011	5:57:05 PM	Bypass valve closed
7/27/2011	5:57:05 PM	Helium valve opened
7/27/2011	5:57:05 PM	Bubbler valve opened
7/27/2011	5:57:05 PM	Helium MFC set to  500.000000
7/27/2011	5:57:05 PM	H2 MFC set to  0.000000
7/27/2011	5:57:05 PM	BCl3 MFC set to  0.000000
7/27/2011	5:57:05 PM	PHl3 MFC set to  0.000000
7/27/2011	5:57:05 PM	SiCl4 MFC set to  0.000000
7/27/2011	5:57:05 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	5:57:05 PM	Tube furnace set to 0
7/27/2011	6:17:05 PM	Helium valve closed
7/27/2011	6:17:05 PM	H2 valve closed
7/27/2011	6:17:05 PM	BCl3 valve closed
7/27/2011	6:17:05 PM	PH3 valve closed
7/27/2011	6:17:05 PM	SiCl4 pre valve closed
7/27/2011	6:17:05 PM	SiCl4 post valve closed
7/27/2011	6:17:05 PM	Main Vac valve closed
7/27/2011	6:17:05 PM	Bypass valve closed
7/27/2011	6:17:05 PM	Bubbler valve closed
7/27/2011	6:17:05 PM	Helium MFC set to  0.000000
7/27/2011	6:17:05 PM	H2 MFC set to  0.000000
7/27/2011	6:17:05 PM	BCl3 MFC set to  0.000000
7/27/2011	6:17:05 PM	PHl3 MFC set to  0.000000
7/27/2011	6:17:05 PM	SiCl4 MFC set to  0.000000
7/27/2011	6:17:05 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	6:17:05 PM	Tube furnace set to 0
7/27/2011	7:17:05 PM	Run finished at 7:17 PM
7/27/2011	10:54:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2011	10:54:39 PM	Recipe started at 10:54 PM
7/27/2011	10:54:39 PM	Helium valve closed
7/27/2011	10:54:39 PM	H2 valve closed
7/27/2011	10:54:39 PM	BCl3 valve closed
7/27/2011	10:54:39 PM	PH3 valve closed
7/27/2011	10:54:39 PM	SiCl4 pre valve closed
7/27/2011	10:54:39 PM	SiCl4 post valve closed
7/27/2011	10:54:39 PM	Main Vac valve closed
7/27/2011	10:54:39 PM	Bypass valve closed
7/27/2011	10:54:39 PM	Bubbler valve closed
7/27/2011	10:54:39 PM	Helium MFC set to  0.000000
7/27/2011	10:54:39 PM	H2 MFC set to  0.000000
7/27/2011	10:54:39 PM	BCl3 MFC set to  0.000000
7/27/2011	10:54:39 PM	PHl3 MFC set to  0.000000
7/27/2011	10:54:39 PM	SiCl4 MFC set to  0.000000
7/27/2011	10:54:39 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	10:54:39 PM	Tube furnace set to 0
7/27/2011	10:54:42 PM	H2 valve closed
7/27/2011	10:54:42 PM	BCl3 valve closed
7/27/2011	10:54:42 PM	PH3 valve closed
7/27/2011	10:54:42 PM	SiCl4 pre valve closed
7/27/2011	10:54:42 PM	SiCl4 post valve closed
7/27/2011	10:54:42 PM	Main Vac valve closed
7/27/2011	10:54:42 PM	Bypass valve closed
7/27/2011	10:54:42 PM	Bubbler valve closed
7/27/2011	10:54:42 PM	Helium valve opened
7/27/2011	10:54:42 PM	Helium MFC set to  500.000000
7/27/2011	10:54:42 PM	H2 MFC set to  0.000000
7/27/2011	10:54:42 PM	BCl3 MFC set to  0.000000
7/27/2011	10:54:42 PM	PHl3 MFC set to  0.000000
7/27/2011	10:54:42 PM	SiCl4 MFC set to  0.000000
7/27/2011	10:54:42 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	10:54:42 PM	Tube furnace set to 0
7/27/2011	10:54:50 PM	Helium valve closed
7/27/2011	10:54:50 PM	H2 valve closed
7/27/2011	10:54:50 PM	BCl3 valve closed
7/27/2011	10:54:50 PM	PH3 valve closed
7/27/2011	10:54:50 PM	SiCl4 pre valve closed
7/27/2011	10:54:50 PM	SiCl4 post valve closed
7/27/2011	10:54:50 PM	Main Vac valve closed
7/27/2011	10:54:50 PM	Bypass valve closed
7/27/2011	10:54:50 PM	Bubbler valve closed
7/27/2011	10:54:50 PM	Helium MFC set to  0.000000
7/27/2011	10:54:50 PM	H2 MFC set to  0.000000
7/27/2011	10:54:50 PM	BCl3 MFC set to  0.000000
7/27/2011	10:54:50 PM	PHl3 MFC set to  0.000000
7/27/2011	10:54:50 PM	SiCl4 MFC set to  0.000000
7/27/2011	10:54:50 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	10:54:50 PM	Tube furnace set to 0
7/27/2011	10:54:51 PM	Run finished at 10:54 PM
7/27/2011	10:54:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2011	10:59:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2011	10:59:41 PM	Recipe started at 10:59 PM
7/27/2011	10:59:41 PM	Helium valve closed
7/27/2011	10:59:41 PM	H2 valve closed
7/27/2011	10:59:41 PM	BCl3 valve closed
7/27/2011	10:59:41 PM	PH3 valve closed
7/27/2011	10:59:41 PM	SiCl4 pre valve closed
7/27/2011	10:59:41 PM	SiCl4 post valve closed
7/27/2011	10:59:41 PM	Main Vac valve closed
7/27/2011	10:59:41 PM	Bubbler valve closed
7/27/2011	10:59:41 PM	Bypass valve opened
7/27/2011	10:59:41 PM	Helium MFC set to  0.000000
7/27/2011	10:59:41 PM	H2 MFC set to  0.000000
7/27/2011	10:59:41 PM	BCl3 MFC set to  0.000000
7/27/2011	10:59:41 PM	PHl3 MFC set to  0.000000
7/27/2011	10:59:41 PM	SiCl4 MFC set to  0.000000
7/27/2011	10:59:41 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	10:59:41 PM	Tube furnace set to 0
7/27/2011	11:00:45 PM	Helium valve closed
7/27/2011	11:00:45 PM	H2 valve closed
7/27/2011	11:00:46 PM	BCl3 valve closed
7/27/2011	11:00:46 PM	PH3 valve closed
7/27/2011	11:00:46 PM	SiCl4 pre valve closed
7/27/2011	11:00:46 PM	SiCl4 post valve closed
7/27/2011	11:00:46 PM	Main Vac valve closed
7/27/2011	11:00:46 PM	Bubbler valve closed
7/27/2011	11:00:46 PM	Bypass valve opened
7/27/2011	11:00:46 PM	Helium MFC set to  0.000000
7/27/2011	11:00:46 PM	H2 MFC set to  0.000000
7/27/2011	11:00:46 PM	BCl3 MFC set to  0.000000
7/27/2011	11:00:46 PM	PHl3 MFC set to  0.000000
7/27/2011	11:00:46 PM	SiCl4 MFC set to  0.000000
7/27/2011	11:00:46 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	11:00:46 PM	Tube furnace set to 0
7/27/2011	11:01:46 PM	Helium valve closed
7/27/2011	11:01:46 PM	H2 valve closed
7/27/2011	11:01:46 PM	BCl3 valve closed
7/27/2011	11:01:46 PM	PH3 valve closed
7/27/2011	11:01:46 PM	SiCl4 pre valve closed
7/27/2011	11:01:46 PM	SiCl4 post valve closed
7/27/2011	11:01:46 PM	Bypass valve closed
7/27/2011	11:01:46 PM	Bubbler valve closed
7/27/2011	11:01:46 PM	Main Vac valve opened
7/27/2011	11:01:46 PM	Helium MFC set to  0.000000
7/27/2011	11:01:46 PM	H2 MFC set to  0.000000
7/27/2011	11:01:46 PM	BCl3 MFC set to  0.000000
7/27/2011	11:01:46 PM	PHl3 MFC set to  0.000000
7/27/2011	11:01:46 PM	SiCl4 MFC set to  0.000000
7/27/2011	11:01:46 PM	Bypass solenoid MFC set to  0.000000
7/27/2011	11:01:46 PM	Tube furnace set to 0
7/27/2011	11:01:47 PM	Run finished at 11:01 PM
7/27/2011	11:01:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
